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System for testing gas sensors or semiconductor device performance

A gas sensor and semiconductor technology, applied in the preparation of test samples, electrical components, material analysis through electromagnetic means, etc., can solve the problems that cannot meet the needs of gas sensors and semiconductor device research and testing, and achieve easy movement, data Accurate and efficient results

Inactive Publication Date: 2011-10-12
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there is currently no system capable of testing the gas-sensing properties of gas sensors and the electrical properties of semiconductor devices at high temperatures, which cannot meet the needs of research and testing of gas sensors and semiconductor devices.

Method used

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  • System for testing gas sensors or semiconductor device performance
  • System for testing gas sensors or semiconductor device performance
  • System for testing gas sensors or semiconductor device performance

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Experimental program
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Embodiment Construction

[0059] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0060] The core idea of ​​the present invention is: through the mass flow controller (3), a certain concentration of the gas to be measured is passed into the sample chamber (6). ) to realize sealing; the sample stage (19) is installed on the flange (11) at one end of the exhaust; the heater (7) heats the device to the required test temperature; the air plug (12) on the flange (11) The electrical connection is drawn out, including the wiring of the thermocouple (20), the electrical connection of the device, the power line of the heater (7), etc.; the gas to be measured at different concentrations will change the current and voltage characteristics of the gas sensor during the test, and then The response performance of the...

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Abstract

The present invention discloses a system to test performance of gas sensors or semiconductor elements, which comprises a gas supply unit to provide gas of controllable concentration and even mixing for performance test of gas sensor sensitivity and discharge test gas upon completion of the test for gas sensor sensitivity, a heating unit to control test temperature and meet demands of performance test of gas sensors or semiconductor elements for different temperature conditions, a test unit to test voltage characteristic variation of the gas sensor or the semiconductor element in test gas of different temperatures and concentrations to realize test for performance of the gas sensor or semiconductor element. The present invention fulfills test for sensitivity performance of the gas sensor and electric performance of the semiconductor element at high temperature and meets demands for research and test of gas sensors and semiconductor elements.

Description

technical field [0001] The invention relates to the technical field of gas sensor or semiconductor device performance testing, in particular to a system for testing the gas sensor performance of a gas sensor or the electrical performance of a semiconductor device. Background technique [0002] With the development of the petrochemical industry, the types and application ranges of flammable, explosive and toxic gases have been increased. Once these gases leak during production, transportation, and use, it will cause poisoning, fire and even explosion accidents, seriously endangering people's lives and property safety. Gas sensors can detect the content of certain gases in the air in a timely and reliable manner, so that effective measures can be taken in time for remedial measures, correct disposal methods can be adopted, accidents caused by leakage can be reduced, and major property and casualties can be avoided. [0003] In recent years, the demand for high-temperature gas...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N27/00G01N1/38H05B3/20H05B1/00
Inventor 王晓亮王新华冯春王保柱马志勇王军喜胡国新肖红领冉军学王翠梅
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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