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Selective MEMS Microphone Readout Circuit and Its Readout Method

A micro-electromechanical microphone and read-out circuit technology, applied in transducer circuits, electrical components, electret electrostatic transducers, etc., can solve problems such as increasing chip power consumption

Inactive Publication Date: 2012-02-08
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] And another type of capacitive micro-electromechanical microphone, this type of microphone is named after it does not have electret material. In other words, when using this type of microphone, an external bias needs to be applied, usually A voltage above 12V is required. Therefore, when this type of microphone cooperates with subsequent circuits, the power consumption of the overall chip will increase.

Method used

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  • Selective MEMS Microphone Readout Circuit and Its Readout Method
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  • Selective MEMS Microphone Readout Circuit and Its Readout Method

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Embodiment Construction

[0043] In many application environments, the specification requirements are often determined according to the required purpose and requirements. For example, mobile devices such as microphones in mobile phone systems should have low power consumption as the main demand point. For fine signal detection such as hearing aids, components with high sensitivity are often required.

[0044] As far as the current two MEMS microphones are concerned, each has its own advantages and disadvantages. For example, the power consumption of the electret MEMS microphone is low, and the sensitivity of the capacitive MEMS microphone is better. Also due to the difference in structure, the matching circuit structure is also different. Therefore, if a circuit structure can be used to read the signal of the electret micro-electromechanical microphone element and the signal of the capacitive micro-electromechanical microphone element, the application of the single element can be more complete and ex...

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Abstract

A selective microelectromechanical microphone readout circuit and its readout method. This type of circuit can read the output signals of electret MEMS microphones and condenser MEMS microphones. Due to different usage requirements of the MEMS microphone, for example, the electret MEMS microphone has lower power consumption, while the capacitive MEMS microphone has higher sensitivity. The way that two types of micro-electro-mechanical microphone detection elements can be matched by one circuit can improve the flexibility of use of the micro-electro-mechanical microphone, and the circuit can also be adapted to the application and design of various capacitive detection elements.

Description

technical field [0001] The present invention relates to a microelectromechanical microphone readout circuit, and in particular to a comprehensive selective microelectromechanical microphone readout circuit and its readout method. Background technique [0002] Micro-Electro-Mechanical System (MEMS for short) technology is a design based on miniaturized mechanical structure. Among the many MEMS technologies, they are mainly used in the three major fields of making micro sensors, micro actuators, and micro structure components. Among them, micro-sensors can be integrated with integrated circuits because they can use related semiconductor manufacturing process technology, so the competitiveness of this technology has been improved, and it has generally received more attention. A microsensor is a microcomponent with sensor characteristics that converts external physical or chemical state quantities (such as light, heat, magnetism, sound, pressure, position, etc.) into electrical...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H04R19/01H04R19/04H04R3/00
Inventor 徐煜淳周文介
Owner IND TECH RES INST