Method for producing heavy caliber quartz glass pipe for IC industry by continuous melting process

A quartz glass tube and large-diameter technology, which is applied in glass forming, glass forming, glass manufacturing equipment, etc., can solve the problems that cannot meet the needs of large-diameter quartz glass tubes, achieve improved melting conditions, optimize melting, eliminate The effect of air bubbles

Inactive Publication Date: 2008-08-06
徐胜利
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this method can only produce quartz glass tubes with a diameter of less than 210 mm, which still cannot meet the needs of the IC industry for large-diameter quartz glass tubes.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0009] Example 1. A method of continuous melting method for producing large-diameter quartz glass tubes for the IC industry. 2 High-purity quartz sand with a content of not less than 99.998% and a metal impurity content of not more than 20ppm is put into the continuous melting furnace and melted by electric heating. The molten quartz glass is drawn into large-diameter quartz glass by the shaper, the material table and the pipe drawing machine. Tube; the diameter of the tungsten-molybdenum crucible in the continuous furnace is 530mm and the height is 1600mm; the diameter of the heating element tungsten rod in the continuous furnace is 4.5mm, the length is 1100mm, and the number of tungsten rods is 72, evenly set; access to the continuous furnace The electric current of the electric heating molybdenum electrode is 235A, the voltage is 20V; the melting temperature is 2200°C; the diameter of the former is 340mm; the diameter of the material table of the continuous melting furnace is 3...

Embodiment 2

[0010] Example 2. A method of continuous melting method for producing large-diameter quartz glass tubes for the IC industry. 2 High-purity quartz sand with a content of not less than 99.998% and a metal impurity content of not more than 20ppm is put into the continuous melting furnace and melted by electric heating. The molten quartz glass is drawn into large-diameter quartz glass by the shaper, the material table and the pipe drawing machine. Tube; the diameter of the tungsten-molybdenum crucible in the continuous furnace is 530mm and the height is 1600mm; the diameter of the heating element tungsten rod in the continuous furnace is 4.5mm, the length is 1100mm, and the number of tungsten rods is 72, evenly set; access to the continuous furnace The electric current of the electric heating molybdenum electrode is 245A, the voltage is 21V; the melting temperature is 2200℃; the diameter of the shaper is 350mm; the diameter of the material table of the continuous melting furnace is 37...

Embodiment 3

[0011] Example 3. A method of continuous melting method for producing large-diameter quartz glass tubes for the IC industry. 2 High-purity quartz sand with a content of not less than 99.998% and a metal impurity content of not more than 20ppm is put into the continuous melting furnace and melted by electric heating. The molten quartz glass is drawn into large-diameter quartz glass by the shaper, the material table and the pipe drawing machine. Tube; the diameter of the tungsten-molybdenum crucible in the continuous furnace is 530mm and the height is 1600mm; the diameter of the heating element tungsten rod in the continuous furnace is 4.5mm, the length is 1100mm, and the number of tungsten rods is 72, evenly set; access to the continuous furnace The electric current of the electric heating molybdenum electrode is 240A, the voltage is 20.5V; the melting temperature is 2200°C; the diameter of the shaper is 345mm; the diameter of the material table of the continuous melting furnace is...

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Abstract

The invention discloses a method for manufacturing a quartz glass tube with large diameter in IC industry by a continuous melting method, which is characterized in that: high purity quartz sand is put into a continuous melting furnace and melted down through electric heating; the melted down quartz glass liquid is drawn to be the quartz glass tube with large diameter through a former , a material platform and a tube drawer; a tungsten molybdenum crucible in the continuous melting furnace has a diameter of 530mm and the height thereof is 1,600mm; a heating body tungsten rod has a diameter of 4.5mm and a length thereof is 1,100mm; the tungsten rod has 72 roots which are arranged evenly; an electric heating molybdenum electrode communicated the continuous melting furnace has electric current of 235 to 245A and the voltage thereof is 20 to 21V; the meltdown temperature is 2,200 DEG C; the diameter of the former is 340 to 350mm; the diameter of the material platform of the continuous melting furnace is 367 to 375mm; the length of a core pole in the continuous melting furnace is 1,900mm. The method for manufacturing a quartz glass tube with large diameter in IC industry by a continuous melting method improves a plurality of technology parameters in the manufacturing technology and equipments; all the technology parameters relate mutually and act synergistically so as to improve the quality and specification of the products.

Description

Technical field [0001] The invention relates to a method for producing a quartz glass tube, in particular to a method for producing a large-diameter quartz glass tube for IC production and use by a continuous melting method. Background technique [0002] The production method of quartz glass tubes in the prior art can only produce qualified quartz glass tubes with a diameter of about 80mm and a wall thickness of 4mm. If a quartz glass tube with a larger diameter is forced to be pulled out, the drawn quartz glass tube There are many air bubbles in the glass tube. The inventor applied for a patent titled "A method for producing large-diameter transparent quartz glass tubes for semiconductor technology by continuous melting method" in 2007. The patent application number is 200710020782.5 and the publication number is CN101054260. However, this method can only produce quartz glass tubes with a diameter of less than 210mm, which still cannot meet the demand for large-diameter quartz g...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C03B20/00
CPCC03B5/027C03B17/04
Inventor 徐胜利
Owner 徐胜利
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