Corrugated pipe elastic element based precision micro- displacement hydraulic scaling device

Abstract

A precise micrometric displacement hydraulic zooming mechanism based on bellow elastic element is disclosed, which is characterized in that two bellows whose two equivalent diameters are D and d separately are coupled through a coupler, the end hole of one end of two bellows is sealed and the other end of two bellows interconnects a cavity of the bellows through a coupler, the bellow cavity is full of hydraulic dielectric and a resistant piece is arranged in the cavity of two bellows connection part. The precise zooming device has no friction, no delay, no return gap for micrometric grade small-stroke displacement, which is fit for optical mirror split, nanometer resolution precise movement and drive on the micrometer grade stroke of hyper-precise manufacture industry. The entire movement of the invention is produced depended on elastic deformation of the bellow completely without friction, which eliminates climbing phenomenon due to friction. The structure of the zooming mechanism can obtain the nanometer grade displacement resolution and precision and the function of the damping fin is to avoid the occurrence of shock. The shape and size of the damping fin can be changed to change the damping factor.

Description

technical field [0001] The invention relates to a precision mechanical device, in particular to a precision micro-displacement hydraulic scaling mechanism based on a bellows elastic element, which is suitable for optical mirror splicing of astronomical telescopes, and the ultra-finishing industry requires nanometer resolution on millimeter strokes precision motion drive. Background technique [0002] With the continuous increase of the caliber of astronomical telescopes, the single main mirror is also getting bigger and bigger. However, due to the limitation of technical level, the processing and grinding of a single large-aperture mirror is becoming more and more difficult. problem. However, with the emergence of spliced ​​mirror active optics technology, this problem has been overcome. The so-called splicing mirror active optical technology is to splice small sub-mirrors into an equivalent large-diameter mirror, and accurately position the mirror by controlling the three...

AI Technical Summary

Problems solved by technology

The usual hydraulic scaling mechanism is shown in Figure 1, which consists of a large piston 1 with a diameter of D, a sealing ring 2, a hydraulic cylinder 3, hydraulic oil 4, a small piston 5 with a diameter of d, and a small sealing ring 6. When the small piston 5 When moving forward δ, the large piston is pushed forward by hydraulic oil The advantage of this mechanism is that it can achieve a large range of motion and displacement, but the disadvantage is that friction creates

[0003] The resulting crawling phenomenon is difficult to solve, it is difficult to improve resolution and accuracy, and requires better maintenance and maintenance, such as dust prevention and lubrication

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