Device manufacturing method, laser processing method, and laser processing apparatus
A technology of laser processing and manufacturing methods, applied to laser welding equipment, lasers, measuring devices, etc., to achieve the effect of precise movement
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[0034] Preferred embodiments of the present invention will be described below with reference to the accompanying drawings.
[0035] First, the principle of a laser processing method according to an embodiment of the present invention will be described with reference to FIGS. 2 to 4 .
[0036] FIG. 2 is a diagram illustrating a laser processing apparatus performing a laser processing method according to an embodiment of the present invention.
[0037] The laser processing apparatus illustrated in FIG. 2 is particularly suitable for processing parts of small devices, and includes a laser oscillator 12 that oscillates a laser beam and an XY-axis automatic table 16 that holds a processing object (workpiece) 14 in place. It should be noted that the operations of the laser oscillator 12 and the XY-axis automatic table 16 are controlled by the control device 18 .
[0038]The laser oscillator 12 may be a laser such as a YAG laser, which oscillates a relatively high-power laser beam t...
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