Method for film coating in enormous quantities with movable plasma case single-chamber
A plasma box and a large number of technologies are applied in the field of manufacturing large-area thin-film silicon photovoltaic templates, which can solve the problems of large differences in substrate thickness, uneven coating thickness, deposition, etc., and achieve the effect of improving productivity and optimizing performance
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[0037] The invention relates to a method for manufacturing thin-film silicon p-i-n photovoltaic devices with high output and low cost by using a movable plasma box with multiple electrodes. The movable plasma box runs through all the steps related to thin film silicon photovoltaic layer coating, and always moves with the substrate. The following production example is a best description of the present invention.
[0038] Figure 5 Is a flow chart, it shows a typical adoption such as image 3 The PECVD system shown is the procedure for producing large quantities of double junction p-i-n thin-film silicon photovoltaic devices.
[0039] In the first step S1, the new tin oxide-plated glass substrate 3 is loaded into the movable plasma box 20 placed on the transport vehicle.
[0040] In the second step S2, the plasma box 20 is transferred into Figure 4 The shown preheating chamber 9 is heated to a preset temperature in the range of 160-260°C.
[0041] In the third step S3, the heated m...
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