Gleam dynamoelectric acceleration gauge based on laser feedback interference

An accelerometer, micro-optical electromechanical technology, used in the measurement of acceleration, speed/acceleration/shock measurement, optics, etc., can solve the problem that the size of the optical accelerometer cannot meet the requirements, achieve low cost, reduce processing difficulty, and have broad commercial prospects Effect

Inactive Publication Date: 2008-09-03
BEIHANG UNIV
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Problems solved by technology

The volume of traditional optical accelerometers can no longer meet the requirements

Method used

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  • Gleam dynamoelectric acceleration gauge based on laser feedback interference
  • Gleam dynamoelectric acceleration gauge based on laser feedback interference
  • Gleam dynamoelectric acceleration gauge based on laser feedback interference

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Embodiment Construction

[0030] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0031] The present invention is a kind of micro-optomechanical accelerometer based on laser feedback interference, and this accelerometer is installed on the device under test, when the device under test has acceleration to exist, (referring to figure 2 As shown) the sensitive mass 202 on the acceleration sensitive part 2 will produce inertial force, thereby causing the sensitive mass 202 to produce a slight displacement, (see Fig. 8 ) resulting in a change in the optical path of the spatial optical path; due to the laser feedback interference, the feedback The feedback light back to the laser is used to modulate the output light of the laser, so that the intensity of the outgoing light of the laser changes; (see image 3 , Figure 4 As shown) two photodetectors (referring to the A photodetector 15 in the upper detection component 1, and the B photodetector...

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Abstract

The invention discloses a glimmer motor accelerometer based on laser feedback interference, comprising upper detecting assembly (1), acceleration sensing unit (2) and down detecting assembly (3), wherein the acceleration sensing unit (2) is between the upper detecting assembly (1) and down detecting assembly (3) and the upper detecting assembly (1) has the same structure with the down detecting assembly. The structure of accelerometer is simple because of laser feedback interference. In order to reduce the size and weight of acceleration, the optimum design for spatial distribution of required parts of the accelerometer is performed. The acceleration sensing unit and glimmer optical reflector are processed by micro-processing technology, at the same time light resource, photo detector and beam collimator are integrated together. Multilayer assembling and packaging are realized using linkage technique, therefore the requirement of accelerometer in precision, reliability, miniaturization and useful life.

Description

technical field [0001] The invention relates to a micro-optical electromechanical accelerometer based on laser feedback interference, which belongs to the technical field of laser and precision measurement. Background technique [0002] Accelerometer is an important component of inertial navigation system and inertial guidance system, which is used to measure the acceleration and linear displacement of moving objects. There are many kinds of accelerometers available, and basically they all have three parts: sensitive mass sensor, detection part and signal processing circuit. The sensitive mass is used to sense the external acceleration signal and convert it into its own displacement information. The detection part is to measure the displacement of the sensitive mass, which can be divided into two types: electrical signal detection and optical signal detection. The signal processing circuit processes the information obtained by the detection part, and outputs the characteri...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/093G02B7/182
Inventor 刘惠兰张春熹冯丽爽马迎建王勇邢济武潘在友
Owner BEIHANG UNIV
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