Multi-angle perpendicular reflector preparation method and product

Abstract

The invention relates a method for manufacturing a multi-angle normal reflection mirror surface and a product. The inventive method carries out deep etching by using a bulk silicon lateral wall as a carrier, mainly changing the ratio of etching time to passivating time, and giving attention to the adjustment on other etching conditions. The invention solves the difficult problem worldwide of manufacturing a single-angle normal reflection mirror surface only on the same vertical lateral wall, the micro-optic device structure in the mirror surface structure can realize a plurality of optic treatment on the same lateral wall, a series of widely used multifunctional MEMS devices can be easily developed, thereby greatly improving the device capability, the integration level and the production efficiency, and further greatly improving the capabilities and the application fields of the MEMS devices. The inventive novel mirror surface manufacturing process has compatibility with most prior vertical mirror surface manufacturing processes, strong portability and adaptability. The method can be widely used in micro-electromechanical systems.

Description

technical field [0001] The invention relates to a manufacturing method and product of a reflecting mirror, in particular to a manufacturing method and product of a multi-angle vertical reflecting mirror. Background technique [0002] Micro-Electro-Mechanical Systems (MEMS) have broad application prospects in national defense and civilian fields, and are now attracting much attention as an emerging technology. Micromirrors fabricated on the vertical side walls of silicon wafers, as key components for micro-operation of optical signals, have been widely used in important fields such as all-optical communication, biological detection, imaging projection, and inertial guidance, and have become the core of optical micro-electromechanical systems. structure. At present, vertical mirrors are generally manufactured by bulk silicon deep etching process. Limited by design principles and process technology, only reflective mirrors with a single vertical angle can be manufactured on th...

AI Technical Summary

Problems solved by technology

At present, vertical mirrors are generally manufactured by bulk silicon deep etching process. Limited by design principles and process technology, only reflective mirrors with a single vertical angle can be manufactured on the same vertical side wall (such as figure 1 , figure 2 shown), so the mirror does not have the ability to achieve multi-angle reflection in the vertical direction, thus limiting the performance and application fields of the mirror

Images