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Design method of bridge arm balance compensating resistance of pressure sensor signal conditioning integrate circuit

A pressure sensor and signal conditioning technology, which is applied in the direction of fluid pressure measurement by changing the ohmic resistance, to achieve the effect of avoiding errors and small adjustment steps

Active Publication Date: 2011-05-11
豪威国际控股有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] The purpose of the present invention is to provide a design method for the bridge arm balance compensation resistor of the pressure sensor signal conditioning integrated circuit, which solves the problem of the existing bridge arm balance compensation resistor The adjustment step fails to reach the ohm level, and the temperature coefficient is inconsistent with the temperature coefficient of the resistance of the sensor, which causes the error problem

Method used

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  • Design method of bridge arm balance compensating resistance of pressure sensor signal conditioning integrate circuit
  • Design method of bridge arm balance compensating resistance of pressure sensor signal conditioning integrate circuit
  • Design method of bridge arm balance compensating resistance of pressure sensor signal conditioning integrate circuit

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Embodiment Construction

[0022] The temperature characteristic of the resistance can be expressed by the quadratic term equation

[0023] R(T)=R0*{1+(1st.Coeff)*(T-T0)+(2nd.Coeff)*(T-T0) 2}

[0024] The temperature characteristic of the resistance of the bridge arm of the silicon pressure sensor used is

[0025] RP(T)=R0*{1+(1.829E-3)*(T-T0)+(0.5546E-5)*(T-T0) 2}

[0026] In the CZ6H process, the temperature characteristics of the resistance of Poly-silicon and N-well are

[0027] Rpolys(T)=R0*{1+(-0.3E-3)*(T-T0)}

[0028] Rnwell(T)=R0*{1+(3.52E-3)*(T-T0)+(1.07E-5)*(T-T0) 2}

[0029] The resistance composed of n parts of Rpolys and (1-n) parts of Rnwell in series is

[0030] Rmix(T)=n*Rpolys+(1-n)*Rnwell

[0031] =R0*{n*(1+(-0.3E-3)*(T-T0))+(1-n)*1+(3.52E-3)*(T-T0)+(1.07E-5 )*(T-T0) 2}

[0032] Therefore, n=0.415 is obtained by solving Rmix(T)≈RP(T).

[0033] That is, mix 0.415 parts of Rpolys with 0.565 parts of Rnwell resistors

[0034] Rmix(T)=0.415*Rpolys+0.565*Rnwell

[0035] The re...

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Abstract

The invention relates to a design method for a bridge arm balance makeup resistor of a pressure sensor signal adjusting integrated circuit, which is characterized in that the bridge arm balance makeup resistor is a variable resistor which is formed by parallel connection of a plurality of mixed resistors and a plurality of circuits which are formed by serial connection of the mixed resistors and MOS switches; wherein the mixed resistor is formed by serial connection of at least two resistors with different temperature coefficients according to a certain resistance value ratio, and the mixed resistor has a similar temperature coefficient with the bridge arm resistor. Because of the solution above, the invention has the beneficial effects that: the adjusting step length of the bridge arm balance makeup resistor is small which can reach the ohm grade; the temperature coefficient and the resistor of the sensor are accordant, which effectively avoids the errors caused by the change of the temperature.

Description

technical field [0001] The invention relates to the relevant technical field of integrated circuit design for signal conditioning applied to piezoresistive pressure sensors, in particular to a design method for bridge arm balance compensation resistors of pressure sensor signal conditioning integrated circuits. Background technique [0002] With the development of semiconductor technology, people have manufactured silicon piezoresistive pressure sensors. Generally, four resistors with equal resistance are formed on the silicon chip by diffusion or ion implantation, and they are connected into a Wheatstone bridge. In the actual manufacturing process, the resistance of the four bridge arms cannot be completely matched. Therefore, when the bridge is in a balanced state, there is a deviation in the resistance of the bridge arm. [0003] In the current pressure sensor signal conditioning integrated circuit, the method of zero point compensation in the amplifier is adopted: in t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L9/06
Inventor 黄岳许刚任文亮
Owner 豪威国际控股有限公司
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