Fan shape off-axis aspherical splicing measuring systems
An off-axis aspheric, measuring system technology, applied in the field of advanced optical manufacturing and inspection, can solve the problems of sensitive adjustment error, low inspection cost, difficult manufacturing, etc., and achieve the effects of easy operation, reduced inspection cost, and simple structure
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[0019] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0020] Such as figure 1 As shown, a fan-shaped off-axis aspheric splicing measurement system in this embodiment is composed of a Fizeau type interferometer 1, a measured fan-shaped off-axis aspheric mirror 2, a computer system 6, an electronically controlled translation stage 4 and a digital driver 5, 3 It is the front view of the measured fan-shaped off-axis aspheric mirror 2. The host computer of the Fizeau-type interferometer 1 is placed on the electronically controlled translation platform 4, and the computer system 6 is connected with the electronically controlled translation platform 4 through the digital driver 5, and is controlled by the computer system 6. The electronically controlled translation stage 4 moves precisely in the direction of the optical axis of the Fizeau-type interferometer 1, and the sector-shaped off-axis aspheric m...
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