Method for forming fine pattern of semiconductor device

Abstract

A method for forming a fine pattern of a semiconductor device includes forming a deposition film over a substrate having an underlying layer. The deposition film includes first, second, and third mask films. The method also includes forming a photoresist pattern over the third mask film, patterning the third mask film to form a deposition pattern, and forming an amorphous carbon pattern at sidewalls of the deposition pattern. The method further includes filling a spin-on-carbon layer over the deposition pattern and the amorphous carbon pattern, polishing the spin-on-carbon layer, the amorphous carbon pattern, and the photoresist pattern to expose the third mask pattern, and performing an etching process to expose the first mask film with the amorphous carbon pattern as an etching mask. The etching process removes the third mask pattern and the exposed second mask pattern.; The method also includes removing the spin-on-carbon layer and the amorphous carbon pattern, and forming a first mask pattern with the second mask pattern as an etching mask.

Description

technical field [0001] The present invention generally relates to methods of forming fine patterns of semiconductor devices. Background technique [0002] With the popularization of information media such as computers, semiconductor device technology has been rapidly developed. Semiconductor devices are required to operate at high speed and to have high memory capacity. As a result, there is a need to manufacture high-capacity semiconductor memory elements with higher integration, reliability, and data access characteristics. [0003] In order to increase the integration of devices, photolithography has been developed to form fine patterns. Photolithography techniques include exposure techniques using chemically amplified deep ultraviolet (DUV) light sources such as ArF (193nm) and VUV (157nm), and techniques of developing photoresists suitable for exposure light sources. [0004] As semiconductor devices become smaller, it is important to control the critical dimension o...

AI Technical Summary

Problems solved by technology

Therefore, the double patterning technique cannot obtain the desired pattern

Misregistration can occur due to inaccurate pattern overlay during the alignment process

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