Bearing table for sputtering machine table

Abstract

The invention relates to a plummer used for a sputtering machine station. The plummer comprises at least one hollow tubular structure, a hollow loading device and a drive unit, wherein, the at least one hollow tubular structure comprises two end parts and an intermediate part which is arranged between the two end parts; the intermediate part is a heat absorbing part; at least one between the two end parts is a cooling part; the two end parts are respectively provided with a first tooth; the at least one hollow tubular structure is used for sleeved arrangement of an element to be coated; second teeth are arranged on the hollow loading device; the first teeth of the two end parts of the at least one hollow tubular structure are engaged with the second teeth; the hollow loading device is used for absorbing the heat transferred by the cooling part of the at least one hollow tubular structure; and the drive unit is used for driving the at least one hollow tubular structure to move along the arrangement direction of the second teeth of the hollow loading device. Under the condition of coating, the heat on the element to be coated can be conducted to the hollow loading device through the hollow tubular structure, thereby the element to be coated is prevented from damage due to overhigh temperature.

Description

technical field [0001] The invention relates to a bearing platform for a sputtering machine platform. Background technique [0002] Coating technology is a novel material synthesis and processing technology, and is an important part of the surface engineering technology field. Coating technology is to use physical and chemical means to coat a thin film with special properties on the solid surface, so that the solid surface has many advantages such as wear resistance, high temperature resistance, corrosion resistance, oxidation resistance, radiation protection, electrical conductivity, magnetic permeability or insulation. Performance, so as to improve product quality, prolong product life, save energy and obtain significant technical and economic benefits. Sputtering is a kind of coating technology, which uses ions generated by glow discharge to hit the target, knocking out the atoms in the target and depositing them on the substrate. Because sputtering has the advantages o...

AI Technical Summary

Problems solved by technology

However, the thermal conductivity of the stage used to carry the components to be plated included in this continuous sputtering machine is not good, which leads to the high temperature of the components on the stage and causes damage such as distortion and deformation.

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