Method for manufacturing film on solar energy battery substrate by sputtering process
A solar cell, sputtering technology, applied in the direction of circuits, electrical components, final product manufacturing, etc., can solve problems such as bending deformation, expansion of deformation, warpage, etc., to reduce thickness, reduce substrate warpage, and reduce costs.
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[0026] The present invention will be described in detail below in conjunction with its preferred embodiments and accompanying drawings, but it should be understood that all preferred embodiments in the invention are for illustrative purposes only, and except the preferred embodiments herein, the present invention It can also be widely applied in other embodiments, and the present invention is not limited to any embodiment.
[0027] Throughout this patent specification, "preferred embodiment" means to describe the special features, structures or characteristics of the preferred embodiment, and in the present invention, the number of the preferred embodiment is at least one. Therefore, the appearance of "in a preferred embodiment" in this specification does not necessarily refer to the same embodiment. Furthermore, special features, structures or characteristics thereof may be incorporated into preferred embodiments using any suitable method.
[0028] refer to figure 1 , is a ...
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