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Method for establishing micro-electromechanical variable cross-section clamped beam system-level macro model

A technique for establishing method and changing section

Inactive Publication Date: 2008-12-10
JIANGSU JIANGHAI MACHINE TOOLS GROUP +1
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the elastic distortion of the material, the wide beam part in the middle will be bent in two dimensions, that is, a saddle-shaped structure is formed, so that the wide beam part in the middle does not move in a rigid flat plate, resulting in poor contact of the switch, or it may be Two-dimensional variation of varactor spacing, adding nonlinear effects
In the past, the wide and narrow beam system-level macro models were all approximated in one dimension, that is, it was assumed that both the wide beam and the narrow beam only had one-way bending along the length direction (X direction), and the bending in the width direction was ignored, resulting in a large model error

Method used

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  • Method for establishing micro-electromechanical variable cross-section clamped beam system-level macro model
  • Method for establishing micro-electromechanical variable cross-section clamped beam system-level macro model
  • Method for establishing micro-electromechanical variable cross-section clamped beam system-level macro model

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Embodiment Construction

[0019] 1. Structure of fixed-support variable-section beam

[0020] see figure 1 , the double-ended fixed-support variable-section beam is connected to the narrow beam 101 by two fixed support points 103 , one end of the two narrow beams 101 is connected to the fixed-support boundary, and the other side is connected to the wide beam 102 . The lower part of the beam is an air layer, and the thickness of the air layer is usually on the order of microns. When an external force acts on the variable-section beam, the beam will undergo bending deformation, which will cause elastic recovery force due to the deformation. Within the range of elastic deformation, the greater the deformation caused by the external force, the greater the elastic recovery force. . When the magnitude of the elastic restoring force is equal to the magnitude of the external force, the beam reaches equilibrium and remains at rest. When the external force is removed, the beam will return to its original posi...

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Abstract

The present invention provides a changing cross section clamped beam system-level macro model building method of a micro-electromechanical system, and relates to a system-level modeling method of the micro-electromechanical system (MEMS) device. The elastic reverting force correction term are introduced into the one-dimensional signal flow model of the changing cross section clamped beam, so as to transform the two-dimensional effects generated by the bending of the wide part of the beam into the one-dimensional model correction; then the accuracy of the model is higher than the model of the one-dimensional signal flow diagram; thus the model and the method can conveniently achieve the system-level simulation of the changing cross section beam with two ends of different sizes, and analyze the static and dynamic behaviors of the changing cross section beam.

Description

technical field [0001] The invention relates to a system-level modeling method for micro-electromechanical systems (MEMS) devices, in particular to a modeling method for micro-electromechanical beams with variable cross-section structures, and belongs to the fields of electricity and semiconductors. Background technique [0002] Double-terminal fixed-support variable-section beams are widely used in the design of RF switches, optical switches and variable capacitors. Its structure is mainly composed of two parts: a wide beam 102 in the middle and narrow beams 101 on both sides. Narrow beams are mainly used for supporting structures, and the core parts of RF switches, optical switches and variable capacitors are wide beams. However, due to the elastic distortion of the material, the wide beam part in the middle will be bent in two dimensions, that is, a saddle-shaped structure is formed, so that the wide beam part in the middle does not move in a rigid flat plate, resulting ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06F17/50B81C5/00B81C99/00
Inventor 李伟华李蓓佳刘天一
Owner JIANGSU JIANGHAI MACHINE TOOLS GROUP
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