Method and apparatus of fine distribution of white light interference sample surface shapes

A technology of white light interference and surface shape, which is used in measurement devices, optical devices, instruments, etc., and can solve the problems of low measurement accuracy and work stability, long data sampling time, and poor anti-interference ability of instruments.

Inactive Publication Date: 2008-12-17
雷枫
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Problems solved by technology

At present, the optical interferometry methods known to users in this field mainly include two types of interferometer measurement methods, single-wave interferometer and multi-wave interferometer, but they are used to measure the surface shape distribution of test

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  • Method and apparatus of fine distribution of white light interference sample surface shapes
  • Method and apparatus of fine distribution of white light interference sample surface shapes
  • Method and apparatus of fine distribution of white light interference sample surface shapes

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Embodiment Construction

[0011] Referring to the accompanying drawings, the device for white light interferometric measurement of the fine distribution of the sample surface shape of the present invention consists of a white light source 4, a lens 3, a semi-reflective beam splitter 11, a CCD camera 1, a lens 2, an interference microscope objective lens 1, and a sample placement It is composed of a platform 9 and a closed-loop piezoelectric ceramic driver 10, etc. The white light source 4, the lens 3 and the semi-reflective beam splitter 11 constitute the lighting source system of the measuring device, and the illuminating light beam emitted by it is divided into the downlink reflected light and the uplink reflected light after passing through the semi-reflected beam splitter 11 set at an inclination angle of 45°. Two beams of light are transmitted. CCD camera 1 and lens 2 constitute the optical imaging system of the device, and are arranged on the optical axis direction of light transmitted by half-re...

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Abstract

The invention relates to a method and a device for measuring fine distribution of sample surface shape by white-light interferometry. The method comprises the following steps: respectively projecting a white light beam on the surfaces of a sample and a reference mirror; combining the reflected light beams of the two surfaces to obtain one beam, and projecting the beam on the photosensitive surface of a CCD camera to obtain interference fringe; and changing the pitch between the sample and an objective lens to form a plurality of interference images on the photosensitive surface, inputting the interference images into a computer to obtain the cosine distribution of amplitude modulation signals relevant to spectral distribution of a light source, sampling the discrete values of the plurality of amplitude modulation signals by an unequal interval sampling method, and calculating the relative height of the sample surface. The measurement device is composed of the light source, a transflective spectroscope, the CCD camera, an interference microscope objective lens, a sample stage, etc., wherein the spectroscope divides the light beam of the light source into a reflective beam and a transmissive beam; the CCD camera and the interference microscope objective lens are respectively arranged on a transmissive optical axis and a reflective optical axis; the CCD camera is control-connected with a computer; and the interference microscope objective lens can be controlled by the computer to make up-and-down movement.

Description

technical field [0001] The content of the present invention belongs to the technical field of optical fine measurement, and relates to an optical non-contact measurement method and its device, in particular to a measurement method and its device for measuring the fine distribution of the surface shape of a sample by using the principle of white light interference. Background technique [0002] In recent years, with the progress and development of precision manufacturing technology, the technology of using light interference method and its device to detect the surface shape of objects, especially the surface shape of precision optical flat objects, has been widely used. At present, the optical interferometry methods known to users in this field mainly include two types of interferometer measurement methods, single-wave interferometer and multi-wave interferometer, but they are used to measure the surface shape distribution of test objects or samples with optical planes. When ...

Claims

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Application Information

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IPC IPC(8): G01B9/023G01B11/24
Inventor 张民芳成武
Owner 雷枫
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