Seal heat treatment apparatus
A heat treatment device and heater technology, applied in transportation and packaging, heating room maintenance, lighting and heating equipment, etc., can solve the problems of increasing the height of the clean room, reducing the loading layer, reducing the beat, etc., to achieve a simple structure and reduce the interval effect of distance
Inactive Publication Date: 2011-05-18
INESA DISPLAY MATERIALS
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Problems solved by technology
[0004] Usually, flat panel displays are produced in a clean room, so once the device is enlarged, the height of the clean room will increase correspondingly, causing the overall operating cost of the clean room to increase
If the height of the clean room is kept constant, it is necessary to reduce the number of layers of the loading layer and expand the structure of the interval between the loading layers, resulting in a decrease in the heat treatment efficiency of the heat treatment device
[0005] In order to solve the above problems, the Chinese patent with the publication number CN1967118 discloses a heat treatment device, which can load the object to be heated at a high density and perform heat treatment. However, in order to prevent the deformation of the substrate and bear a large weight at the same time, the number of sliding mechanisms required There are more supporting feet, which increases the complexity of the equipment, and the sliding mechanism at the entrance of the substrate will affect the insertion of the substrate, which will reduce the beat and affect the heat treatment efficiency; and in the display area of the substrate where the supporting feet are set, due to the heat capacity Different, prone to display unevenness
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[0027] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0028] figure 2 is a schematic diagram of the structure of the sealed heat treatment device, image 3 It is a structural schematic diagram of the sealing heat treatment device and the manipulator device of the present invention.
[0029] Please refer to figure 2 and image 3 , the sealing heat treatment device 20 comprises a loading layer 22 for placing the substrate 30 in multiple layers, a heater 24, a frame 21 for fixing the loading layer 22 and the heater 24, and a manipulator device 25 for picking and placing the substrate 30, the frame 21 is divided into a plurality of loading layers 22 by metal grids. The manipulator device 25 includes two parallel guide rails 251 placed horizontally. The guide rails 251 are located on the front and rear sides of the heat treatment device 20. Two A movable manipulator 252, the manipulator 252 can be provide...
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The invention discloses a sealing heat treatment device, the heat treatment device comprises a loading layer which can place basal plates in multi-layer, a heater and a frame for fixing the loading layer and the heater, wherein the left side, the right side and the bottom of the loading layer are provided with metal clips, the frame is provided with controllable doors corresponding to each loading layer, and the heater is arranged on the bottom of the frame, wherein the controllable doors are arranged on the top end of the frame, and the basal plates and the loading layer are vertically arranged in the frame. The sealing heat treatment device provided by the invention can load heated objects with high intensity, and is convenient for the large-scale of the heat treatment device and not reducing heat treatment efficiency.
Description
technical field [0001] The invention relates to a heat treatment device, in particular to a sealing material heat treatment device. Background technique [0002] In the production process of most flat panel display devices, heat treatment devices are basically required. For these heat treatment devices, the structure of the existing sealing material heat treatment device is as follows: figure 1 As shown, a heating device 14 is arranged at the bottom of the frame 11, and a multi-layer loading layer 12 for placing substrates is placed at a certain interval on the heating device 14. Correspondingly, one side of the frame 11 is provided with a The controllable door 13 corresponding to the layer 12, the controllable door 13 is a slit-shaped opening for taking and placing the substrate, the substrate is put in and taken out by a robot device, the substrate is placed horizontally in the heat treatment device, and is controlled by a specified temperature. Hot air wrapping, corresp...
Claims
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IPC IPC(8): H01L21/677F27D5/00F27D7/04F27D3/00H01L21/00F27B17/00B25J15/08
Inventor 徐亮
Owner INESA DISPLAY MATERIALS