Laser irradiation apparatus and laser processing system using the same

A laser irradiation and laser processing technology, which is applied in metal processing, laser welding equipment, metal processing equipment, etc., can solve the problems of reducing laser utilization efficiency and not being able to use a universal micro-mirror array, and achieve good light utilization efficiency Effect
CN101354481AInactive Publication Date: 2009-01-28OLYMPUS CORP
8 Cites 7 Cited by

Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
OLYMPUS CORP
Publication Date
2009-01-28
Estimated Expiration
Not applicable · inactive patent

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
  • Figure 3
    Figure 3
Patent Text Reader

Abstract

The invention relates to a laser irradiating device and a laser processing system using the same. The laser processing system comprises a laser source; a reflecting mirror for causing the laser emitted from the laser source to deflect by a deflection surface supported movably; a reflector moving mechanism for configuring the deflection surface to deflect correspondingly to an optical axis P1 of the laser and move in the optical axis P1 direction; a space modulating element for modulating the laser deflected by the reflector in space and forming opening light towards the irradiated surface; and a projection optical system for projecting the opening light formed by the space modulating element to the processed surface.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The present invention relates to a laser irradiation device and a laser processing system using the laser irradiation device. Background technique

[0002] Conventionally, a laser processing device (laser irradiation device) is known that performs processing by irradiating a laser beam to a desired region of a workpiece. For example, in the manufacture of liquid crystal displays and the like, laser trimming devices are known as devices for trimming defective parts such as wiring patterns on glass substrates and unnecessary residues present on photomasks used for exposure.

[0003] For example, the laser processing device described in Patent Document 1 (Japanese Unexamined Patent Publication No. 8-174242) has: a laser source; a processing table on which a workpiece is placed; ), by turning ON / OFF (ON / OFF) control to switch the angles of a plurality of reflective mirrors of the micro-mirror array to form arbitrary pattern shapes on the workpiece. [00...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More