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Resonant actuator

A technology for actuators and resonant frequencies, applied in the manufacture/assembly of piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric/electrostrictive devices, etc., can solve mechanical problems Problems such as increased loss, large displacement, complex equipment, etc., to achieve the effect of suppressing the decline of the mechanical quality coefficient Qm and realizing equipment and cost reduction

Inactive Publication Date: 2009-02-04
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] That is to say, the resonant actuator using PZT-type piezoelectric ceramics has the following problem: Since the vibration speed is saturated when the vibration speed becomes large, a vibration speed exceeding 1 m / s cannot be obtained as a result, and therefore, a relatively high performance cannot be obtained. Large displacement resonant actuator
Moreover, there is also the following problem: for a certain high electric field, since the vibration speed is not proportional to the applied electric field E and is lower than a logic value, a feedback circuit for controlling the vibration speed to a logic value is required, resulting in complex equipment
[0011] In addition, as described in Non-Patent Document 2, it is known that when conventional PZT-based piezoelectric ceramics are used for a resonant actuator, the resonance frequency fr and the mechanical quality coefficient Qm decrease as the vibration speed increases.
Therefore, there is a problem that it is necessary to set a feedback circuit to track the change of the resonance frequency fr, which makes the equipment complicated
At the same time, due to the decrease of the mechanical quality coefficient Qm, the mechanical loss increases, and the heat generation of the piezoelectric ceramic increases. Therefore, in practical applications, it is very difficult to use it at a large vibration speed.

Method used

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Examples

Experimental program
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Effect test

Embodiment 1

[0078] [production of sample]

[0079] Using non-oriented Bi as a bismuth layered compound 2 SrNb 2 o 9 (hereinafter referred to as "SBN") type materials and SBN type materials oriented on the c-axis, and the displacement elements of the sample numbers 1 and 2 were produced in which the displacement direction and the polarization direction were in the same direction.

[0080] In addition, as a comparative example, using a PZT-based material, a displacement element of sample number 3 whose displacement direction and polarization direction are in the same direction, and a displacement element of sample number 4 whose displacement direction is perpendicular to the polarization direction were fabricated. element.

[0081] Hereinafter, the preparation procedure of each sample will be described in detail.

[0082] [Sample No. 1]

[0083] As a ceramic raw material, prepare SrCO 3 、 Bi 2 o 3 , Nb 2 o 5 、Nd 2 o 3 and MnCO 3 , to satisfy the final composition as the composi...

Embodiment 2

[0142] Various SBN-based samples having different degrees of orientation F of the c-axis were produced, and the properties were evaluated.

[0143]That is, calcined powder and flaky ceramic particles were produced using the same method and procedure as in sample number 2 of [Example 1].

[0144] In addition, after that, the weight ratio was changed, and the flaky ceramic particles and calcined powder were mixed so that the orientation degree F of the c-axis in the ceramic sintered body was 54%, 75%, and 95%. Sample number 2] The same method and steps were used to make sample number 22 (degree of orientation F: 54%), sample number 23 (degree of orientation F: 75%) and sample number 24 (degree of orientation F: 95%) SBN samples.

[0145] In addition, each orientation degree F of sample numbers 22-24 was computed and confirmed using the Lotgering method similarly to the sample number 2 of [Example 1].

[0146] In addition, as sample number 21, a non-oriented SBN-based sample wa...

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Abstract

A resonance actuator comprises a drive section equipped with a displacement element oscillating at a resonance frequency or in a frequency region in the vicinity of the resonance frequency, and a member driven by the displacement element, wherein the displacement element has a piezoelectric ceramic element composed of a bismuth layer compound. Displacing direction of the displacement element is preferably identical to the polarizing direction of the piezoelectric ceramic element, the bismuth layer compound has the c-axis of crystal axis preferably oriented in the direction perpendicularly intersecting the polarizing direction of the piezoelectric ceramic element, and the degree of orientation of the c-axis is preferably 75% or above by Lot gering method. Consequently, even if saturation vibration speed is high and the vibration speed is increased, the vibration speed is not destabilized and a fall in resonance frequency fr or mechanical quality factor Qm can be suppressed as much as possible, resulting in a resonance actuator capable of providing a large displacement even if a high electric field is applied.

Description

technical field [0001] The present invention relates to a resonance actuator, more particularly to a resonance actuator using piezoelectric ceramic material. Background technique [0002] The displacement of piezoelectric actuators is usually determined by the piezoelectric constant d, so at present, Pb(Zr,Ti)O with a large piezoelectric constant 3 (Lead zirconate titanate, hereinafter referred to as "PZT".) The research and development of piezoelectric ceramic materials based on it is very popular. [0003] For example, non-patent document 1 describes the large-amplitude characteristics of piezoelectric ceramics because power devices such as piezoelectric actuators utilize large-amplitude elastic vibrations of piezoelectric ceramics. [0004] The above-mentioned Non-Patent Document 1 reports that the vibration velocity (= vibration amplitude × frequency) logically changes in proportion to the applied electric field E, and when the PZT-type piezoelectric ceramic is driven a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/09H01L41/187H02N2/00C04B35/00H01L41/257H01L41/39
CPCH01L41/0906H01L41/187H10N30/853H10N30/8561H10N30/206H02N2/026H10N30/202
Inventor 川田慎一郎堀川胜弘木村雅彦小川弘纯
Owner MURATA MFG CO LTD