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Non-contact six-degree of freedom micro-displacement measuring device

A measuring device and a technology of degrees of freedom, applied in the high-precision measurement of relative micro-displacement of six degrees of freedom between objects, in the field of six-degrees of freedom micro-displacement measurement, can solve the problems of insufficient installation space, complex structure, difficult to apply, etc., and achieve simple structure , High measurement accuracy, easy installation and adjustment

Inactive Publication Date: 2009-03-11
BEIJING INFORMATION SCI & TECH UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When performing six-degree-of-freedom displacement monitoring in a certain workpiece space, the above-mentioned degree-of-freedom measurement methods generally have problems such as complex structures and insufficient installation space, which are difficult to apply

Method used

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  • Non-contact six-degree of freedom micro-displacement measuring device
  • Non-contact six-degree of freedom micro-displacement measuring device
  • Non-contact six-degree of freedom micro-displacement measuring device

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Embodiment Construction

[0014] Reference will now be made in detail to embodiments of the invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like parts throughout. The embodiments are described below in order to explain the present invention by referring to the figures.

[0015] figure 1 It is a schematic diagram of a multi-channel laser output structure according to an embodiment of the present invention. refer to figure 1 , the multi-channel laser output structure includes a semiconductor laser light source 1 , an optical fiber 2 , an optical fiber coupler 3 , an optical fiber 4 and a collimator 5 . The semiconductor light source 1 emits laser light, which is transmitted to the fiber coupler 3 through the optical fiber 2. The fiber coupler 3 divides the laser light into three beams, which are independently transmitted from the optical fiber 4 and collimated by the collimator 5, and then output as the required beam 6.

[0016] fig...

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Abstract

The invention provides a non-contact six-freedom-degree (DOF) micrometric displacement measurement device, which comprises: a movable part, an object to be measured which is fixed with the movable part, a stationary part, and three area-array CCDs, wherein, the first area-array CCD and the second area-array CCD are fixed with the movable part together, and the third area-array CCD is fixed with the stationary part together; a three-way laser output structure is fixed with the stationary part together and emits three beams which are respectively received by the three area-array CCDs, wherein, when the object to be measured carries out movement of arbitrary DOF, the position of a light point on the corresponding area-array CCD is caused to be changed, and the six-DOF displacement of the object to be measured is calculated according to the change of the light point position before and after the movement of the object to be measured. The non-contact six-DOF micrometric displacement measurement device can be used for the six-DOF micrometric displacement monitoring of high-precision objects.

Description

technical field [0001] The invention relates to a six-degree-of-freedom micro-displacement measurement method, which belongs to the field of photoelectric measurement, and is particularly suitable for high-precision measurement of relative micro-displacement with six degrees of freedom between objects. Background technique [0002] The movement of any object in space has 6 degrees of freedom, that is, translation along 3 directions (t x , t y , t z ) and the rotation around the three orientation axes (θ x , θ y , θ z ). The development of modern science and technology has put forward higher requirements for machining accuracy, installation accuracy and detection accuracy in many fields such as aerospace, aviation, machinery and instrumentation. The positioning of the workpiece to be processed, the installation of precision parts, and the monitoring of the position and movement of the target object in space all require measurement, adjustment and control of up to 6 degr...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02G01B11/03
Inventor 刘力双吕勇郎晓萍吕乃光孙鹏
Owner BEIJING INFORMATION SCI & TECH UNIV
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