Movement supporting mechanism for silicon chip surface observation
A support mechanism and a technology on the surface of silicon wafers, which can be used in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., and can solve problems such as large volume, high cost, and unstable movement
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[0014] The present invention will be described in detail below with reference to the accompanying drawings and embodiments.
[0015] like Figures 1 to 3 As shown, the present invention includes a horizontal bearing seat 2 fixed on the worktable 1 , and a bearing 3 is arranged in the horizontal bearing seat 2 . A hollow support 4 passes through the bearing 3 and exposes the table 1 at the upper and lower ends. A large gear 5 is fixedly sleeved on the pillar 4 passing through the bottom surface of the worktable 1, and a small gear 6 is meshed with the large gear 5. The pinion 6 is fixed on the output end of the horizontal motor 7, and the horizontal motor 7 is fixed on the worktable. 1 on the attached bracket (not shown in the figure).
[0016] The above-mentioned transmission assembly composed of two meshing gears may also be two gears connected by a toothed belt.
[0017] A wing lug 8 protrudes from the bottom end of the strut 4, a crank motor 9 is fixed on the wing lug 8,...
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