High precision micro displacement detection device for demarcating machinery deformation amount and measurement method thereof

Abstract

The invention relates to a device for detecting mechanical micrometric displacement and a method for measuring the same, in particular to a high precision micrometric displacement detection device for labeling the mechanical micro-variation of a special micrometric displacement sensor. An electric analyzing part consists of a shell, a rectification voltage stabilizer, a phase discriminator, a high frequency oscillator, an analog-digital converter, a logic processor, a micrometric displacement display, an inductive micrometric displacement sensor and the like. A mechanical analyzing part consists of a mechanical pedestal part, a high multiplying factor speed reducer, a micrometric displacement generating part and the like. When the measurement is started, the high multiplying factor speed reducer is rocked and rotated to modulate a system to the zero displacement, the displacement variation of the rotation angle of a crank plate is changed from the range of between delta phi below zero and delta phi into the range of between delta L below zero and delta L, and is used as the mechanical input quantity of the special micrometric displacement sensor and detection touch iron of the inductive micrometric displacement sensor through a correlative transmission device acting on two ends of the special micrometric displacement sensor. The device has the advantages of simple structure, strong reliability, high sensitivity and long service life.

Description

technical field [0001] The invention relates to a mechanical micro-displacement detection device and a measurement method thereof, in particular to a high-precision micro-displacement detection device and a measurement method for calibrating mechanical micro-deformation for a special micro-displacement sensor. Background technique [0002] As for the special detection device for calibrating the mechanical deformation, so far, there is no special technical standard and product. [0003] 1. Application and performance [0004] The purpose of the design and invention of the high-precision micro-displacement detection device is to provide a calibration device and its measurement method for calibrating mechanical stress and deformation for an important technical parameter of a special micro-displacement sensor: mechanical input displacement of sensitivity. [0005] 2. The traditional method of measuring mechanical displacement is the "stress displacement" detection method [00...

AI Technical Summary

Problems solved by technology

Even if the batch number of the metal material used in the reference part and the detected part is the same, the accuracy of the measurement result will not be high

[0011] ●Because of the gap between the batch number of the metal substrate material used in the reference measurement component part and the tested component part, the actual (tensile) Young's modulus of the material is different, and the stress generated by the device causes the reference part and the tested component part to differ. Unavoidable errors will occur in the deformation of the detection part. This kind of error is also troublesome in system processing, resulting in weak reliability of test data.

[0012] The metal body used in the reference measurement component part and the detected component part will have a component force on the system stress, resulting in an increase in the system stress, which will also lead to the impact of the increased stress on the system machinery, resulting in a corresponding mechanical strain of the system Unavoidable errors will also occur in the deformation amount, and the measurement accuracy will decrease

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