Differential confocal combination ultra-long focal length measuring method and apparatus

A differential confocal and measurement method technology, applied in the direction of testing optical performance, etc., to achieve the effect of reducing the length of the measurement optical path, reducing the depth of focus of the lens, and high stability

Active Publication Date: 2009-04-08
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

[0007] The purpose of the present invention is to solve the problem of high-precision measurement of small numerical aperture and ultra-long focal length lenses, and propose a method that use

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  • Differential confocal combination ultra-long focal length measuring method and apparatus
  • Differential confocal combination ultra-long focal length measuring method and apparatus
  • Differential confocal combination ultra-long focal length measuring method and apparatus

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[0037] Such as image 3 As shown, a differential confocal combination ultra-long focal length measurement method, the measurement steps are:

[0038] First, turn on the light source 12, emit parallel light through the beam splitting system composed of the polarizing beam splitter 13 and the 1 / 4 wave plate 14, converge at the focus position a7 through the reference lens 5 with a focal length of 3000mm, and the light is reflected by the reflector 8 , reflected by the 1 / 4 wave plate 14 and the polarizing beam splitter 13 into the beam splitter 25 of the differential confocal fixed-focus system; the beam splitter 25 divides the light into two paths, and the transmitted light passes through the lens b24 and the pinhole b23 to illuminate the CCD detector b22 , the reflected light passes through the lens a21 and the pinhole a20 to illuminate the CCD detector a19; the reflector 8 is scanned and moved along the translation stage a15 in the direction of the optical axis of the reference...

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Abstract

The invention belongs to the optical precise measurement technical field and relates to an ultra-long focal distance measuring method and a corresponding apparatus used for a differential confocal combined lens. The method firstly adopts the differential confocal focusing theory to respectively define the focus position of a reference lens and the focus position of the combination of measured lens and reference lens; then the distance delta between two focuses and the distance d<0> between two lenses are measured and then the formula is adopted to figure out the focal distance of the measured lens and the sensitivity for focal distance measurement can be simultaneously enhanced with the pupil filtering technique during the measuring process. The invention firstly puts forward the adoption of the features of the corresponding micro-lens focus while the differential confocal response curve passes the zero point so as to extend the differential confocal microscopy theory to the ultra-long focal distance measurement field and form the differential confocal focusing theory. The invention integrates the differential confocal focusing theory and the lens combination so as to get the advantages that the measurement precision is high and the anti-interference capability is strong. The invention can be applied to the detection for the lens with ultra-long focal distance and the high-precise focal distance measurement in the optical system assembling process.

Description

technical field [0001] The invention belongs to the technical field of optical precision measurement and can be used for the detection of ultra-long focal length lenses and the high-precision focal length measurement in the assembly process of optical systems. technical background [0002] In recent years, ultra-long focal length lenses have been widely used in large-scale optical systems such as high-energy lasers and astronomical telescopes. The processing, testing and assembly of such large-scale lenses are very difficult. As an important parameter of an ultra-long focal length lens, its focal length measurement has always been a difficult point in the field of optical measurement. The main factors are: small numerical aperture and long depth of focus make it difficult to achieve precise focusing; Susceptible to environmental disturbances. Due to the above reasons, traditional fixed-focus methods such as the magnification method or the pentaprism method are difficult to ...

Claims

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Application Information

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IPC IPC(8): G01M11/02
Inventor 赵维谦孙若端邱丽荣沙定国
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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