Strain type micro-nano-scale micro-nano displacement sensor

A displacement sensor, micro-nano technology, applied in instruments, measuring devices, electrical devices, etc., can solve the problems of affecting the accuracy of the sensor, low response frequency, poor anti-interference ability, etc., and achieve simple structure, high sensitivity and good reliability. Effect

Inactive Publication Date: 2009-05-20
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
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Problems solved by technology

However, its relatively high price and the need for a large space to place devices have greatly limited its large-scale application in industries, teaching and scientific research.
[0004] Chemical sensors, which use chemical reactions to measure displacement, have poor anti-interference ability and low response frequency, and have not yet been widely used in production and scientific research.
[0005] Capacitive sensors

Method used

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  • Strain type micro-nano-scale micro-nano displacement sensor
  • Strain type micro-nano-scale micro-nano displacement sensor
  • Strain type micro-nano-scale micro-nano displacement sensor

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Experimental program
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Embodiment Construction

[0027] see figure 1 , in this embodiment, the specific structure of the detection unit composed of each rigid rod body and flexible hinge is set as:

[0028] The first-stage amplifying mechanism for displacement is provided with a first-stage lever arranged in an "L" shape, the first-stage short rod 11 is the input arm, and the first-stage long rod 12 is the output arm, and the end of the short rod connected to the fixed seat is flexible. The hinge 13 is a first-level fulcrum, the first-level measured displacement is formed on the short rod 11, and the long rod-end flexible hinge 14 connected to the second-level amplification mechanism is the first-level output end of the measured displacement;

[0029] The displacement amount is provided with a secondary amplification mechanism, which has a straight rod section lever 21, one end of which is connected to the fixed seat with a straight rod end flexible hinge 22, and the other end is an elastic body 3 connected with a multi-degr...

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Abstract

The invention provides a strain type micro-nano class micro-nano displacement transducer. The micro-nano displacement transducer is characterized by having a detection unit which is formed by rigid rod bodies and flexible hinges and is provided with a lever type displacement first-level amplification mechanism and a displacement second-level amplification mechanism. Through multi-level amplification, the micro-nano displacement transducer allows a strain piece on an elastic body to detect the movement of a detecting object, and acquires detection results by external signal acquisition and processing equipment. The displacement transducer has the advantages of high integration, small volume, low energy consumption, high precision, low cost, simple structure, high sensitivity, easy labeling and good reliability.

Description

technical field [0001] The invention relates to a displacement measuring device, more specifically a micro-nano level displacement measuring device. Background technique [0002] With the rapid development of industry and scientific research, human beings are currently actively carrying out academic research and practical applications in the microscopic field. With the invention of the atomic force microscope, the manufacturing industry is approaching the micro- and nano-levels. Means and technology put forward higher requirements. As far as the micro-displacement test system is concerned, the main structural forms of micro-displacement sensors currently used to obtain micro-displacement are: [0003] Optical sensors, namely laser interferometers, laser interference films, etc., are measured using optical principles. This type of technology is now mature, and the resolution can reach about 1nm. However, its relatively high price and the need for a large space to place devi...

Claims

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Application Information

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IPC IPC(8): G01B7/02
Inventor 余永宋博杨卫超葛运建
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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