Strain type micro-nano-scale micro-nano displacement sensor

Abstract

The invention provides a strain type micro-nano class micro-nano displacement transducer. The micro-nano displacement transducer is characterized by having a detection unit which is formed by rigid rod bodies and flexible hinges and is provided with a lever type displacement first-level amplification mechanism and a displacement second-level amplification mechanism. Through multi-level amplification, the micro-nano displacement transducer allows a strain piece on an elastic body to detect the movement of a detecting object, and acquires detection results by external signal acquisition and processing equipment. The displacement transducer has the advantages of high integration, small volume, low energy consumption, high precision, low cost, simple structure, high sensitivity, easy labeling and good reliability.

Description

technical field [0001] The invention relates to a displacement measuring device, more specifically a micro-nano level displacement measuring device. Background technique [0002] With the rapid development of industry and scientific research, human beings are currently actively carrying out academic research and practical applications in the microscopic field. With the invention of the atomic force microscope, the manufacturing industry is approaching the micro- and nano-levels. Means and technology put forward higher requirements. As far as the micro-displacement test system is concerned, the main structural forms of micro-displacement sensors currently used to obtain micro-displacement are: [0003] Optical sensors, namely laser interferometers, laser interference films, etc., are measured using optical principles. This type of technology is now mature, and the resolution can reach about 1nm. However, its relatively high price and the need for a large space to place devi...

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Problems solved by technology

However, its relatively high price and the need for a large space to place devices have greatly limited its large-scale application in industries, teaching and scientific research.

[0004] Chemical sensors, which use chemical reactions to measure displacement, have poor anti-interference ability and low response frequency, and have not yet been widely used in production and scientific research.

[0005] Capacitive sensors, capacitive sensors have high resolution and response frequency, and have certain applications in actual production and scientific research. However, the processing technology of the capacitive diaphragm in the capacitive sensor is strict, and it is very easy to produce manufacturing errors, which will affect the sensor. Accuracy, capacitive sensor travel is small, poor linearity, which also affects its scope of use

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