Method for producing high power varying optical attenuator

A manufacturing method and technology of attenuating sheet, applied in the direction of coupling of optical waveguides, etc., can solve the problems of rough edges of metal holes, limited selection of metal materials, complicated manufacturing processes, etc., and achieve smooth edges, low polarization-related loss, and manufacturing simple craftsmanship

Active Publication Date: 2009-06-03
GUANGXUN SCI & TECH WUHAN
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Problems solved by technology

[0005] The invention proposes a new manufacturing process, which overcomes the complex manufacturing process of the current metal small-hole type high-power attenuator, the limited choice of metal materials used, the edge of the metal small hole is not smooth, the repeatability is poor, and the yield is low. problem, solved the above deficiencies

Method used

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  • Method for producing high power varying optical attenuator
  • Method for producing high power varying optical attenuator
  • Method for producing high power varying optical attenuator

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Embodiment Construction

[0023] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0024] A high-power variable optical attenuation film, such as figure 1 As shown, it is composed of a thick metal film 12 plated on a glass substrate 11, and a pre-designed light-transmitting hole 13 is made on it, and the light-transmitting small holes are from left to right along the length direction of the glass substrate. The area is gradually reduced, so that the light attenuation is gradually increased.

[0025] made as figure 1 The metal hole type high-power attenuator shown in the figure is usually used as figure 2 The shown process flow includes 4 process steps: (1) first coat a layer of metal film 22 on the glass substrate 21, and the attenuation of the metal film to light of 1310nm or 1550nm or other design wavelengths is usually greater than 60dB; 2) carry out the photolithography process then, coat photoresist 23 on the metal film surfa...

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Abstract

The invention belongs to the optical passive device technical field, relating to a method for producing a high power variable optical attenuator. A metallic thin film loophole is produced on a glass substrate and the fenestration varies gradually along the length of the substrate, thus the attenuation of optical power varies gradually along the length of the substrate. The metallic thin film loophole is produced by stripping the metals. In the invention, the metallic thin film loophole does not need to be produced by wet or dry etching technique, the production technique is simple, and the reproducibility is good; the metallic thin film of the surface can be any one layer or a plurality of layers of metallic materials, thus the thin film is not limited by the wet or dry etching technique on materials; and the edge of the metallic little hole of the finished attenuator is smooth, and the rate of finished products of the device is high.

Description

technical field [0001] The invention relates to a method for manufacturing a variable optical attenuation sheet, which belongs to the technical field of optical communication, and in particular relates to the technical field of passive optical devices. Background technique [0002] Variable Optical Attenuator (Variable Optical Attenuator, VOA) is an important component in modern broadband optical fiber communication systems. Power fluctuations during transmission, improving the overall performance of the network. [0003] At present, there are many schemes for realizing the variable light attenuation function, some of which use electromagnetic or thermo-optic crystals, some of which use micro-electromechanical (MEMS) technology, and some of which use a metal absorption film with a gradient thickness plated on a glass substrate (CN 03128173.7) , or make light-transmitting metal holes with gradually changing light-transmitting area on the glass substrate (US 6,480,662B1). ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/26
Inventor 王定理祝业盛马卫东唐琼廖志霞
Owner GUANGXUN SCI & TECH WUHAN
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