Production method of integrated submissive sensor for measuring curve clearance and force
A technology for measuring curved surfaces and compliance, applied in the field of sensors, can solve the problems of unrealizable installation position and lead wire method, increased difficulty in processing, measurement and monitoring, etc., and achieve a large range, good compliance, high force-sensitivity precision and resolution. Effect
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[0039] The preparation method of the integrated compliant sensor for measuring the surface gap and force proposed by the present invention, the front plan view of the sensor before packaging during the preparation process is as follows figure 1 shown, including the following steps:
[0040] (1) Preparation of planar eddy current sensitive elements:
[0041] (1-1) Open holes 4 in rows and columns on the polyimide film substrate 1, the thickness of the polyimide film is 100 μm-200 μm, and the aperture of the holes is 250-350 μm;
[0042] (1-2) Copper foil is respectively plated on the front and back surfaces of the polyimide film substrate and the surface of the above-mentioned opening, and the thickness of the copper foil is 15 μm-20 μm;
[0043] (1-3) Photolithography is carried out to the above-mentioned reverse copper foil, and the eddy current coil 7 is formed centering on the above-mentioned opening 4, and an inner lead 3 is formed on one side of each eddy current coil 7,...
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