Mixed integral single fibre three-way device
A technology of hybrid integration and single integration, which is applied in the coupling of optical waveguides, electromagnetic wave transmission systems, electrical components, etc., can solve the problems of high cost of discrete devices, difficult assembly process, and a large amount of manual assembly time, so as to reduce process difficulty, cost reduction effect
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[0026] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0027] refer to figure 1 , fabricating a three-output wavelength arrayed waveguide grating 11, a first input waveguide 10, a first output waveguide 12, a second output waveguide 14, and a second input waveguide 13 by dry etching on a silicon-on-insulator (SOI) substrate 100, The silicon thickness of the upper layer of the SOI is 5 μm, the thickness of each involved waveguide is 5 μm, the width of the etched waveguide is 4 μm, and the depth is 2 μm. .
[0028] Polish the first output waveguide 12 and the end of the second output waveguide 14 to form an angle of 45 degrees, which is used to reflect the output light to the upper side of the waveguide; mix and integrate a laser 15 on the SOI substrate 100, and the function o...
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