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Anti-reflection plate and production method for anti-reflection structure

A manufacturing method and anti-reflection technology, applied in the direction of nanostructure manufacturing, nanotechnology, coating, etc., can solve the problems of unpopularization, high cost of anti-reflection technology products, high cost, etc.

Inactive Publication Date: 2009-07-22
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since most of the existing thin film processes need to be coated in a vacuum environment, the required process is very time-consuming and expensive
In addition, the yield rate of multi-layer films is difficult to control, making the cost of products using anti-reflection technology very high and cannot be popularized by the public

Method used

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  • Anti-reflection plate and production method for anti-reflection structure
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  • Anti-reflection plate and production method for anti-reflection structure

Examples

Experimental program
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Effect test

Embodiment 1

[0039] Please refer to figure 1 , which is a flow chart showing the steps of forming the anti-reflective plate according to Embodiment 1 of the present invention. and please also refer to Figure 2A , which shows a schematic diagram of the object to be treated and the atmospheric plasma equipment. Firstly, as shown in step 11 , an object to be processed 100 is provided in the reaction zone 6 , and the object to be processed 100 is placed on the platform 5 with the exposed surface 101 under the plasma torch 2 . In this embodiment, the object 100 to be processed is, for example, a substrate. The material of the object 100 to be processed may be glass or polymethyl methacrylate (PMMA), used as a protective cover or window glass for a display, or a silicon wafer used to manufacture a solar panel.

[0040] Next, as shown in step 12 , plasma is provided to originate in the reaction region 6 . The plasma source can be at least one of inert gas, air, nitrogen, oxygen, fluorocarbon...

Embodiment 2

[0050] The difference between the second embodiment and the anti-reflection sheet of the first embodiment lies in that the anti-reflection sheet of the second embodiment forms a micro-protrusion structure by plasma coating under normal pressure. Please refer to Figure 4 , which is a flow chart showing the steps of forming the anti-reflection plate according to the second embodiment of the present invention. and please also refer to Figure 5A , which shows a schematic diagram of the substrate to be coated and the atmospheric plasma equipment.

[0051] First, as shown in step 21 , the object to be coated 200 is provided in the reaction zone 6 , and the exposed surface 201 of the object to be coated 200 is placed on the platform 5 and located under the plasma torch 2 . In this embodiment, the object to be coated 200 is, for example, a substrate. The material of the object to be coated 200 is, for example, PMMA, silicon wafer or glass.

[0052] Next, as shown in step 22 , pl...

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Abstract

The invention discloses a method for manufacturing an anti-reflection configuration, comprising the following steps: firstly, an object to be treated is placed in a reaction area and a plasma source is placed in the reaction area; then the plasma source is dissociated under normal pressure to form plasma; and then the plasma is used for processing the surface of the object to be treated and a plurality of tiny prominent structures are formed on the surface of the object to be treated.

Description

technical field [0001] The invention relates to an anti-reflection plate and a method for manufacturing the anti-reflection structure thereof, in particular to an anti-reflection plate with an anti-reflection structure of nanoscale micro-protrusions and a method for manufacturing the anti-reflection plate. Background technique [0002] Anti-reflection technology can be widely used in various fields, such as the surface of eyeglass lenses and optical discs, or the display surface of TV, computer screen, digital camera, PDA, GPS and mobile phone, as well as the surface of automobile glass, aircraft and automobile dashboard, Even display windows and biomedical applications. After the object is treated with anti-reflection technology, it can reduce the glare or ghost phenomenon caused by the reflection of the external light source on the surface of the object, and even use it on the surface of the solar collector to increase the utilization efficiency of light energy, etc., whic...

Claims

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Application Information

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IPC IPC(8): G02B1/11B82B3/00B82B1/00H01L31/18G02B1/118
Inventor 陈志玮吴清吉谢文宗许文通林春宏
Owner IND TECH RES INST