Back irradiation plane type PIN structure GaN-based ultraviolet detector and preparation method
A UV detector, planar technology, applied in the field of UV detectors, to achieve the effects of avoiding large surface recombination, improving reliability and practicability, and facilitating interconnection
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[0029] According to the required half-height width of the response peak, combined with theoretical and actual technical level and material parameters, the material and structure of the back-illuminated planar-based PIN structure GaN ultraviolet photodetector are designed. Combine our example to illustrate the detailed process.
[0030] The structure of the back-illuminated planar PIN structure GaN-based ultraviolet detector as shown in the attached figure of the description is an epitaxial growth of a layer of about 0.6 microns thick undoped on a double-sided polished (0001) sapphire substrate 1. Doped AlN buffer layer 2; about 1 micron thick Si doping concentration is 1×10 18 cm -3 N-type Al 0.3 Ga 0.7 N layer 3; the active layer 4 is an intrinsic GaN layer with a thickness of about 0.15 microns and an electron concentration of 2×10 16 cm -3 ; Finally, a Mg-doped p-GaN layer 5 with a thickness of about 0.1 microns, with a hole concentration of about 2×10 17 cm -3 . Use a high-ene...
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