Method for production of magnetic recording medium, magnetic recording medium and magnetic recording and reproducion device
一种磁记录介质、磁记录的技术，应用在磁记录、数据记录、唱片载体制造等方向，能够解决生产率和成本劣化、制造工艺复杂、介质易遭受污染等问题，达到高记录密度特性、提高生产率、优良分离磁记录图形的能力的效果
Inactive Publication Date: 2009-08-26
RESONAC HOLDINGS CORPORATION
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Problems solved by technology
Disadvantages of the former method, commonly referred to as the magnetic layer processing type, are that it makes the media susceptible to contamination during manufacture and complicates the manufacturing process as it requires physical processing of the surface after the media has been formed
The latter method, generally called embossing type method, is not easy to cause contamination during the manufacturing process, but its disadvantage is that since the concave-convex shape formed on the substrate is destined to continue to exist in the On the formed film, the flying posture and flying height of the recording and reproducing head adapted to perform recording and reproduction while floating on the medium cannot be stabilized
However, this causes additional labor time such as when preparing a preliminary mask by using an organic resist and processing the layer of metal or oxide as a mask by dry etching.
This labor time is disadvantageous by complicating the process and deteriorating productivity and cost
Method used
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example 1
[0087] Pre-evacuate the vacuum chamber in which the glass substrate for HD is set to 1.0 × 10 -5 Vacuum below Pa. The glass substrate used here has Li 2 Si 2 o 5 、Al 2 o 3 -K 2 O, MgO-P 2 o 5 and Sb 2 o 3 -ZnO crystallized glass material as its material has an outer diameter of 65 mm and an inner diameter of 20 mm, and has The average surface roughness (Ra).
[0088] On this glass substrate, a soft magnetic layer of FeCoB, an intermediate layer of Ru and 70Co-5Cr-15Pt-10SiO 2 The magnetic layer of the alloy, and the C (carbon) protective film layer and the fluorine-based lubricating film are sequentially laminated by using the P-CVD method. In film thickness, the FeCoB soft magnetic layer is measured as The measured value of the Ru interlayer is The measured value of the magnetic layer is And the average measured value of the C (carbon) protective film layer was 4 nm. After that, a magnetic pattern is formed on the magnetic layer. Specifically, methylsilox...
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Abstract
A method for the production of a magnetic recording medium includes the steps of forming a magnetic layer on a nonmagnetic substrate, injecting atoms into portions of the magnetic layer to cause the portions to be demagnetized or allowed to acquire amorphousness, thereby forming a magnetically separated magnetic recording pattern, the step of injecting atoms including the steps of applying to a surface of the formed magnetic layer an SOG film as a resist, partly removing or thinning the resist, and irradiating the surface with atoms, thereby partly injecting atoms into the magnetic layer through the portions of the magnetic layer from which the resist is removed or in which the resist is thinned.
Description
[0001] Cross References to Related Applications [0002] This application is based on the application filed under 35 U.S.C. §111(a) under 35 U.S.C. §119(e)(1), claiming the Japanese patent filed under 35 U.S.C. §111(b) on September 22, 2006 Priority of Application No. 2006-257153. technical field [0003] The present invention relates to a magnetic recording medium used in a hard disk drive, a manufacturing method thereof, and a magnetic recording and reproducing apparatus. Background technique [0004] In recent years, as magnetic recording devices such as magnetic disk drives, flexible disk drives, and magnetic tape drives have greatly expanded their scope of use and remarkably gained, efforts have been made to make the magnetic recording media used in these drives in terms of recording density significant improvement. In particular, the increase in surface recording density has further grown dramatically due to the introduction of magnetoresistive (MR) heads and partial...
Claims
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IPC IPC(8): G11B5/855G11B5/65
CPCG11B5/855
Inventor 坂胁彰福岛正人
Owner RESONAC HOLDINGS CORPORATION