Micro array type colloid propeller
A micro-array and thruster technology, applied in the direction of thrust reversers, machines/engines, mechanical equipment, etc., can solve problems such as difficult injection control, and achieve the effect of avoiding influence and interference
Inactive Publication Date: 2011-05-11
ZHONGBEI UNIV
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[0005] In order to realize the miniaturization and micro-thrust of the colloid thruster, and at the same time solve the problems such as liquid supply of the jet nozzle and difficulty in spray control, the present invention provides a micro-array colloid thruster based on MEMS technology
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[0022] The micro-array colloidal thruster, including jet 1 and extraction electrode 2 made of high-resistance single crystal silicon substrate processed by ICP etching process, and placed between jet 1 and extraction electrode 2 and bonded to the two poles The glass supporting frame 3 (ie the middle pole), the high-resistance single crystal silicon substrate 4 of the jet 1 is etched with a number of tubular nozzles 5, and the side of the jet 1 etched with the tubular nozzles 5 faces the extraction electrode 2. The tubular nozzles The infusion channel 6 of 5 vertically penetrates the high-resistance single crystal silicon substrate 4, the tubular nozzles 5 on the jetting pole 1 are arranged in columns, and the high-resistance single crystal silicon substrate 4 of the jetting pole 1 is etched with several parallel strips. Slot 7, and only one row of tubular nozzles 5 is arranged in the strip-shaped etching groove 7 (that is, there are strip-shaped semiconductor silicon ridges 8 be...
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The invention relates to a micro colloid propeller, in particular to a micro array type colloid propeller. The micro array type colloid propeller realizes micromation and microthrust, solves the problems of difficult control of liquid supply and jetting of a nozzle of a jetting pole and the like and comprises the jetting pole, a drawing pole and a glass supporting frame body; a base plate of the jetting pole is etched with a plurality of tubular nozzles which are arranged in row, and is also etched with a plurality of strip etching grooves which are parallel; each strip etching groove is internally provided with a row of tubular nozzles; the bottom of each etching groove and the top part of the tubular nozzle are sputtered with an aluminium layer; one end of each etching groove respectively provided with a terminal communicated with the aluminium layer at the bottom of the groove; the inside of a liquid delivery channel of the tubular nozzle is processed into a porous silicon structure by adopting HF etching technique; the drawing pole is paliform, and strip grid seams thereof face the etching grooves of the jetting pole. The micro array type colloid propeller has the advantages of stable performance, high aligning precision, convenient processing and easy control for liquid supply and jetting and the like and can realize the purpose of controlling jetting of the nozzle by batches.
Description
Technical field [0001] The invention relates to a micro colloid thruster, in particular to a micro array type colloid thruster based on MEMS technology. Background technique [0002] With the development of aerospace technology, deep space exploration, and lunar soft landing technology, on the one hand, micro-nano satellites are required to be miniaturized, that is, to reduce the volume and weight of the thrusters that account for a large proportion of the micro-nano satellites; on the other hand, the thrusters are required to be able to Provides micron-level thrust to achieve precise positioning. [0003] Such as figure 1 As shown, the existing micro-colloidal thruster uses the principle of electric injection to convert electrical energy into kinetic energy. The thruster includes a jet electrode and an extraction electrode. The strong polar liquid is used as the working medium, and a high voltage is added between the jet electrode and the extraction electrode. The high voltage is...
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IPC IPC(8): F03H99/00
Inventor 熊继军张国军张文栋寇丽丽薛晨阳
Owner ZHONGBEI UNIV