Multi-junction solar cells and methods and apparatuses for forming the same
A solar cell and multi-junction technology, applied in circuits, electrical components, photovoltaic power generation, etc., can solve problems such as low efficiency and high cost
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[0107] The embodiments disclosed herein are illustrative in nature and are not intended to limit the scope of the invention unless explicitly set forth in the claims.
[0108] handle has a 4,320cm 2 surface area substrates, may be performed in an AKT 4300 PECVD system with an internal chamber volume of 130 liters, available from AKTAmerica Inc., Santa Clara, California. Layer 1 was deposited in the first chamber of the PECVD system. Layers 2-4 were deposited in the second chamber of the PECVD system. Layer 5 is deposited in the third chamber of the PECVD system. Layers 6-11 were deposited in the fourth chamber of the PECVD system. During the deposition of layers 1-11, the spacing was set at 550 mils and the substrate temperature was set at 200°C. Image 6 The deposition parameters set in are used to form tandem p-i-n junction solar cells. Phosphine was supplied as a 0.5% mixture in a hydrogen carrier gas. Trimethylboron was provided as a 0.5% mixture in a hydrogen carrie...
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