Multi-junction solar cells and methods and apparatuses for forming the same

A solar cell and multi-junction technology, applied in circuits, electrical components, photovoltaic power generation, etc., can solve problems such as low efficiency and high cost

Inactive Publication Date: 2009-09-23
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Problems with current thin-film solar cells include low efficiency and high cost

Method used

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  • Multi-junction solar cells and methods and apparatuses for forming the same
  • Multi-junction solar cells and methods and apparatuses for forming the same
  • Multi-junction solar cells and methods and apparatuses for forming the same

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Embodiment

[0107] The embodiments disclosed herein are illustrative in nature and are not intended to limit the scope of the invention unless explicitly set forth in the claims.

[0108] handle has a 4,320cm 2 surface area substrates, may be performed in an AKT 4300 PECVD system with an internal chamber volume of 130 liters, available from AKTAmerica Inc., Santa Clara, California. Layer 1 was deposited in the first chamber of the PECVD system. Layers 2-4 were deposited in the second chamber of the PECVD system. Layer 5 is deposited in the third chamber of the PECVD system. Layers 6-11 were deposited in the fourth chamber of the PECVD system. During the deposition of layers 1-11, the spacing was set at 550 mils and the substrate temperature was set at 200°C. Image 6 The deposition parameters set in are used to form tandem p-i-n junction solar cells. Phosphine was supplied as a 0.5% mixture in a hydrogen carrier gas. Trimethylboron was provided as a 0.5% mixture in a hydrogen carrie...

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Abstract

Embodiments of the present invention generally relate to solar cells and methods and apparatuses for forming the same. More particularly, embodiments of the present invention relate to thin film multi-junction solar cells and methods and apparatuses for forming the same. Embodiments of the present invention also include an improved thin film silicon solar cell, and methods and apparatus for forming the same, where one or more of the layers in the solar cell comprises at least one amorphous silicon layer that has improved electrical characteristics and mechanical properties, and is capable of being deposited at rates many times faster than conventional amorphous silicon deposition processes.

Description

technical field [0001] Embodiments of the invention generally relate to solar cells and methods and apparatus for forming the same. More specifically, embodiments of the present invention relate to thin film multi-junction solar cells and methods and devices for forming the same. Background technique [0002] Solar cells convert solar radiation and other light into usable electrical energy. Energy conversion occurs due to the photovoltaic effect. Solar cells can be formed from crystalline materials or from amorphous or microcrystalline materials. Generally speaking, there are two main types of solar cells mass-produced today, namely crystalline silicon solar cells and thin-film solar cells. Crystalline silicon solar cells typically employ either a single crystalline substrate (ie, a single crystal substrate of pure silicon) or a polycrystalline silicon substrate (ie, polycrystalline or polycrystalline silicon). Additional layers are deposited on silicon substrates to imp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/00
CPCY02E10/52H01L31/076H01L31/202Y02E10/545H01L31/1824Y02E10/548H01L31/03921Y02P70/50H01L31/0445H01L31/047
Inventor 盛殊然蔡容基崔寿永元泰景李立伟
Owner APPLIED MATERIALS INC
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