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42 results about "Thin film silicon solar cell" patented technology

Silicon-based nanometer column array heterojunction film solar battery and preparation method thereof

The invention discloses a silicon-based nanometer column array heterojunction film solar battery and a preparation method thereof, belonging to the field of solar battery manufacture. The method comprises the following steps: preparing a metal nanocrystalline masking layer on a P-type solar silicon substrate; using the metal nanocrystalline masking for masking, adopting a dry method to erode the silicon substrate and preparing a silicon nanometer column array; removing the metal nanocrystalline masking; sequentially depositing an intrinsic amorphous silicon layer and an N-type amorphous silicon layer and forming heterojunction; and finally, depositing a transparent conductive film layer and preparing an upper contact electrode and a lower contact electrode. The method can once prepare a solar battery array with a large area, greatly decreases the cost, has the advantages of simple preparation technology, low cost, favorable preparation efficiency and technological stability, has technological flows fully compatible with the preparation technology of the prior crystal silicon solar batteries and film silicon solar batteries and is easy to popularize on a large scale.
Owner:INST OF MICROELECTRONICS CHINESE ACAD OF SCI

Method for manufacturing novel light-trapping synergetic antireflection structure on basis of LSP (localized surface plasma) effect

The invention belongs to the technical field of solar cells, and particularly relates to a method for manufacturing a novel light-trapping synergetic antireflection structure on the basis of an LSP (localized surface plasma) effect. The method includes etching a cone shape on the surface of monocrystalline silicon by alkali; and depositing a layer of discontinuous silver nanoparticles on the surface of a cone by means of sputtering and annealing to obtain the novel light-trapping structure with the silver nanoparticles and a cone structure which are compounded with one another. The reflectivity of the novel light-trapping synergetic antireflection structure is reduced by 3.4% within the total solar spectrum range as compared with a pure cone structure. The method for manufacturing the effective light-trapping structure includes simple and practical silicon wafer cleaning and silver nanoparticle sputtering and depositing technological procedures, and a constant-temperature wet etching means is combined with the LSP effect, so that an excellent antireflection effect is realized as compared with the traditional structure manufactured by alkaline etching, and design and manufacturing processes of the method provide novel technical means for improving the efficiency of silicon and the efficiency of a thin film silicon solar cell.
Owner:NORTH CHINA ELECTRIC POWER UNIV (BAODING)

Back scattering surface of thin-film silicon solar cell and preparation method of back scattering surface

The invention relates to a back scattering surface of a thin-film silicon solar cell and a preparation method of the back scattering surface. In the invention, a thin film which is used as the back scattering surface is a composite film and is compounded by a metal and an Ag film, wherein the metal is in direct contact with a substrate and has a shape which is easy to change at a lower temperature; the thickness of the metal film is in a range of 250-600 nm and the thickness of the Ag film is in a range of 20-50 nm; and the surface of the composite film is of a rough structure shape with a submicron size. The structure is prepared by adopting a physical vapor deposition method; in a high-vacuum environment, the method comprises the following steps of: under the condition of heating the substrate, depositing the metal film on the substrate and then depositing the Ag film to form the composite film; or under the condition of the room temperature, depositing the metal film on the substrate and then depositing the Ag film to form the composite film; and then carrying out vacuum heat treatment on the deposited composite film at a temperature in a range of 150-250 DEG C. According to the invention, the scattering property of the surface of the formed composite film is great, the temperature for changing the shape of the metal film is lower and the heat treatment temperature for reducing surface roughening is reduced; meanwhile, the consumption of the noble metal Ag is reduced and the manufacturing cost is reduced.
Owner:TONGJI UNIV
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