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Vacuum electron beam welding method

A technology of vacuum electron beam and welding method, which is applied in the direction of electron beam welding equipment, welding equipment, metal processing equipment, etc., which can solve the problems of complex process and long target material cycle, so as to speed up the cycle and avoid cooling or suction Vacuum, the effect of improving welding quality

Active Publication Date: 2009-10-21
KONFOONG MATERIALS INTERNATIONAL CO LTD
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Problems solved by technology

[0005] However, in the above-mentioned technical scheme, in order to improve the welding quality and reduce the porosity in the weld seam of the final target blank assembly, vacuum insulation is carried out after the first vacuum electron beam welding is performed, and then the second vacuum electron beam welding is performed. Welding, the process is more complicated
And as we all know, after the first welding, the temperature of the final target blank assembly is very high, and it takes a long time to lower it to a certain temperature, plus the holding time, the overall target production cycle is longer

Method used

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specific Embodiment

[0040] As an embodiment of the present invention, the target blank 200 and the back plate 100 to be welded are both aluminum, and under the conditions of the corresponding preheating specific example described above, the conditions of the vacuum welding are: the voltage is 60KV, the line speed The current is 10mm / s, the beam current is 90mA, and the focusing current is 650mA.

[0041] As another embodiment of the present invention, the target blank 200 and the back plate 100 to be welded are both copper, and under the conditions of the corresponding preheating example mentioned above, the conditions of the vacuum welding are: the voltage is 60KV, the line speed The current is 15mm / s, the beam current is 85mA, and the focusing current is 640mA.

[0042] As another embodiment of the present invention, the target blank 200 and the back plate 100 to be welded are both titanium, and the vacuum welding conditions are as follows: the voltage is 70KV, the linear velocity is 18mm / s, th...

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Abstract

The invention discloses a vacuum electron beam welding method, which comprises the following steps of: providing a target blank material and a backboard used for supporting the target blank material; implementing welding preparation; pre-heating; and adopting the vacuum electron beam to implement vacuum welding to weld the target blank material on the backboard. The vacuum electron beam welding method also comprises the step of directly implementing surface modification after the vacuum welding. The vacuum electron beam welding method directly implements surface modification after the vacuum welding and does not need vacuum insulation or pump air to reduce the temperature, thus avoiding the subsequent step of vacuumizing, quickening the cycle period of the product and simultaneously reducing the porosity of the sputtering target blank material after being welded.

Description

technical field [0001] The invention relates to the field of welding, in particular to a vacuum electron beam welding method. Background technique [0002] The vacuum electron beam welding process is to place the workpiece to be welded in a vacuum environment and use a directional high-speed electron beam to hit the workpiece to convert kinetic energy into heat energy and melt the workpiece for welding. Due to the high energy density of the electron beam, the weld seam is relatively thin Narrow, large aspect ratio, less welding stress and deformation, it has been widely used in the field of semiconductor sputtering. [0003] In actual production, the biggest problem of the vacuum electron beam welding process is the presence of pores in the weld. At present, the common methods to reduce the porosity in China are mainly repeated electron beam welding and scanning electron beam welding. Among them, repeated electron beam welding refers to repeated welding on the same weld. It...

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Application Information

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IPC IPC(8): B23K15/06
Inventor 姚力军潘杰王学泽欧阳琳刘庆
Owner KONFOONG MATERIALS INTERNATIONAL CO LTD
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