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Linear motor driver

A linear motor and driver technology, applied in the direction of linear DC motor control, DC motor speed/torque control, AC motor control, etc., can solve the problems of low power, secondary breakdown of power amplifiers, etc., and achieve frequency bandwidth and operating voltage High, low distortion effect

Inactive Publication Date: 2009-11-11
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Abstract
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AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved by the present invention is to provide a linear motor driver to solve the problem that the existing linear motor driver has low power and the power amplifier is prone to secondary breakdown

Method used

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  • Linear motor driver
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Embodiment Construction

[0024] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0025] The high-power linear motor driver of the present invention can be widely applied to various motor-driven devices, and the following is an illustration through a preferred embodiment. Of course, the present invention is not limited to this specific embodiment. Common substitutions known to the skilled person undoubtedly fall within the protection scope of the present invention.

[0026] Secondly, the present invention is described in detail using schematic diagrams. When describing the embodiments of the present invention in detail, for the convenience of illustration, the schematic diagrams are not partially enlarged according to the general scale, which should not be used as a limitation of the present invention.

[0027] Plea...

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Abstract

The invention provides a linear motor driver which comprises a current feedback loop module, a power module, a detecting module, and a state analysis and control module. The motor driver is characterized in that the current feedback loop module comprises a preposing input stage module, an adder module, a low pass filter module, a power amplification feedback module, a loading module, a current sampling amplification module and a gain adjustment module which are connected in sequence; and the output signal of the gain adjustment module is connected on the input end of the adder module finally, thus forming a loop. The linear motor driver has the characteristics of high linearity, wide bandwidth, good stability, small interference to outside, and strong capacity of resisting disturbance, and is small in volume and low in cost. As the temperature coefficient of the drain-source resistance of the power amplifier is positive, when the temperature of the power amplifier rises, the current is limited, therefore, no thermal breakdown occurs, and consequently, no secondary breakdown occurs.

Description

technical field [0001] The invention relates to the field of linear motor devices, in particular to a high-power linear motor driver. Background technique [0002] In the lithography machine, the linear motor driver is used to drive the linear motor to drive the workpiece table and mask table to move. As the drive device of the motor, the motor driver must meet the requirements of high linearity, high resolution, high power, and broadband, so as to ensure the positioning accuracy of the motor, and then meet the requirements of lithography accuracy. [0003] There are two main types of existing linear motor drivers, namely linear power amplifier drivers and pulse width modulation drivers. The linear power amplifier driver adopts an OTL complementary push-pull circuit or an OCL complementary push-pull circuit formed by connecting multiple power transistors in parallel. Its advantages are mainly frequency bandwidth (usually above 10KHZ), good linearity, small external interfe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02P7/00H02P7/02H02P25/06
Inventor 彭之威周月豪池峰
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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