Magnetic sensor element and method for manufacturing the same

Abstract

A magnetic sensor element is provided with a hard magnetic material film (2) formed on a nonmagnetic substrate (1); an insulating layer (3) covering the hard magnetic material film (2); and a soft magnetic material film (4) formed on the insulating layer (3), and the magnetizing direction of the hard magnetic material film (2) is at an angle (Theta) to the longitudinal direction of the soft magnetic material film (4). In a planar view of the nonmagnetic substrate (1), a region whereupon the soft magnetic material film (2) is formed is preferably within a region larger than that where the softmagnetic material film (4) is formed, and that all the regions whereupon the soft magnetic material film (4) is formed overlap the region whereupon the hard magnetic material film (2) is formed. Uniform bias magnetic field can be obtained from the magnetic sensor element.

Description

technical field [0001] The present invention relates to a thin-film magnetoresistance effect element known as a high-sensitivity magnetic sensor and other magnetic sensor elements. Conventionally, such devices have been used, for example, in electronic compasses that detect geomagnetism to indicate azimuth, rotary encoders, and biomagnetic measurements. [0002] This application claims the priority of Japanese Patent Application No. 2007-007979 filed in Japan on January 17, 2007 and Japanese Patent Application No. 2008-004880 filed in Japan on January 11, 2008, and uses the contents thereof here. Background technique [0003] Conventionally, magnetoresistance effect elements have characteristics in which impedance changes symmetrically with respect to positive and negative magnetic fields. Therefore, in order to detect positive and negative magnetic fields near zero magnetic field, it is necessary to apply a bias magnetic field to the magnetoresistance effect element so th...

AI Technical Summary

Problems solved by technology

[0005]1. In applying a bias magnetic field with a wound coil, there are problems such as difficulty in miniaturization of components, complicated structure, and large power consumption

[0006]2. In applying a bias magnetic field through a thin film coil, there are problems such as complex structure and large power consumption

[0007]3. In applying a bias magnetic field through sheet magnets and block magnets, there are problems such as difficult control of the magnetic field intensity, complicated assembly process, and difficulty in obtaining high mechanical strength.

[0008]4. In applying a bias magnetic field through a thin film magnet, there is a problem that the magnetic field intensity is difficult to control

[0009] Here, the reason why it is difficult to control the strength of the magnetic field when applying the bias magnetic field through the magnet is because the characteristics of the magnet determine the size of the bias magnetic field, and it is difficult to correct the bias caused by the magnetic field itself. Due to the deviation of the bias magnetic field caused by the characteristic deviation of the

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