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Driving objective table and chip mounter using the driving objective table

A technology of stage and linear motor, which is applied in the manufacture of conveyor objects, electrical components, semiconductor/solid-state devices, etc., can solve problems such as difficult to prevent failures, increase machine weight, etc., to suppress torsional deformation, achieve high life and high Accuracy, failure prevention effect

Inactive Publication Date: 2009-12-09
HITACHI HIGH TECH INSTR CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] However, there is a limit to suppressing failure by strengthening the linear guide and changing the material, and it is difficult to prevent failure when increasing the load in the direction parallel to the installation surface of the linear guide and the beam by increasing the mass of the moving body and increasing the magnetic attraction force
In addition, when increasing the size of the linear guide to mount electronic components on a large-area wafer, the beam must be increased to secure the installation surface, which increases the overall weight of the machine

Method used

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  • Driving objective table and chip mounter using the driving objective table
  • Driving objective table and chip mounter using the driving objective table
  • Driving objective table and chip mounter using the driving objective table

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Embodiment Construction

[0041] Preferred embodiments of the present invention will be described below with reference to the drawings.

[0042] The present invention relates to a drive stage and a placement machine with a drive stage. First, the structure of the placement machine will be described.

[0043] Figure 4 and Figure 5 is a schematic structural diagram showing the structure of the mounter, Figure 4 is its side view, Figure 5 is the floor plan. Such as Figure 4 and Figure 5 As shown, the placement machine 30 has: a base 32 on which a substrate 31 is provided; a driving stage moving device 33 which is arranged on the base 32, supports the driving stage 10, and moves in one direction (as the Y-axis direction); The drive stage 10 is provided on the drive stage moving device 33 .

[0044] The driving stage moving device 33 has: a pair of linear guide rails (linear guide rails for the Y axis) 34 arranged parallel to each other on the base 32 sandwiching the substrate 31; A stage supp...

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Abstract

The present invention provides a driving objective table which can prevent the generation of fixed part sliding and bolt breakage, restrain the torsional deformation of beam caused by magnetic attraction and realize long service lifetime and high precision of driving objective table, and a chip mounter using the driving objective table. The driving objective table comprises the following components: a beam; a plurality of linear guide ways which are provided on the beam along the length direction of the beam; a slider which slides freely along the linear guide ways; and a moving object which is fixed on the slider and moves along the linear slideway through the slider; wherein the setting surface of at least one linear guide way in the plurality of guide ways and the beam is vertical to the setting surfaces of other guide ways and the beam.

Description

technical field [0001] The present invention relates to a drive stage used in a semiconductor manufacturing device and an electronic component mounting device, and a mounter using the drive stage. Background technique [0002] Semiconductor manufacturing equipment and electronic component mounting equipment (mounting machines), such as a drive stage that moves in a one-axis direction (X direction) on a rail by a mechanism for mounting electronic components on a printed circuit board, and drives the drive stage to The mechanism that moves the track vertically (Y direction) mounts electronic components on the printed circuit board (XY plane). In particular, for a drive stage used in a chip mounter, a linear motor is used as an operating mechanism for moving the mounting mechanism. [0003] Figure 6 It is a side view showing an example of a conventional drive stage (see Patent Document 1). [0004] Such as Figure 6 As shown, in the conventional drive stage, one linear motor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/683H01L21/677H01L21/00H01L21/50
Inventor 井村真狩野良则山口晴彦柏谷尚克山口正树成濑友博
Owner HITACHI HIGH TECH INSTR CO LTD