Developer control system

Abstract

The invention discloses a developer control system, which comprises a chemical and water supply unit, a developer concentration detection unit and an ultraviolet light-absorption detection unit, wherein the chemical and water supply unit is communicated with a developer storage tank unit through a pipeline; the developer concentration detection unit and the ultraviolet light-absorption detection unit are used to detect developer concentration and photoresist concentration of developing circulating fluid in the developer storage tank unit; a control unit is arranged on the pipeline communicating the chemical and water supply unit with the developer storage tank unit; and the control unit is communicated with the developer concentration detection unit and the ultraviolet light-absorption detection unit through the pipeline and a signal data transmission line, calibrates the developer concentration detection unit and the ultraviolet light-absorption detection unit, and controls the chemical and water supply unit to input deionized water or / and concentrated pure developer into the developer storage tank unit according to the feedback information of the developer concentration detection unit and the ultraviolet light-absorption detection unit. The system has the advantages of real-time monitoring-controlling function, calibration function and capability of ensuring qualified rate of products.

Description

technical field [0001] The present invention relates to a developer control system, more specifically, to a developer concentration and photoresist concentration that can be measured and adjusted in real time, and can calibrate the developer concentration detection unit and the ultraviolet light absorption detection unit developer control system. Background technique [0002] At present, the production of Thin Film Transistor-Liquid Crystal Display (hereinafter referred to as: TFT-LCD) is roughly divided into three major processes: array, box forming, and module, and in the array process, it is roughly divided into film formation, optical Engraving and etching three major processes. Among them, the photolithography process is to apply photoresist on the glass substrate, and then perform exposure and development. In the development process, the control of the concentration of the developer is very important, that is to say, the instability of the concentration of the develop...

AI Technical Summary

Problems solved by technology

Although the developer concentration detection unit 13 and the ultraviolet light absorption detection unit 12 are provided in the existing DCS system, the developer concentration and photoresist concentration data measured by the developer concentration detection unit 13 and the ultraviolet light absorption detection unit 12 It is not transmitted to the chemical and water supply unit 14 located at the far end. The chemical and water supply unit 14 cannot directly regulate the amount of water in the developer storage tank unit 11 according to the data measured by the developer concentration detection unit 13 and the ultraviolet light absorption detection unit 12. The concentration of the liquid only plays the function of supplying liquid, that is to say, it can only be adjusted manually or replaced with new liquid regularly

[0003] It can be seen that although the existing DCS can measure the developer concentration and photoresist concentration in the developing circulating fluid in real time, due to the developer concentration Between the detection unit 13 and the ultraviolet light absorption detection unit 12 and the chemical and water supply unit 14, there is a device for real-time transmission of information, so the problem of real-time adjustment and control of the developer concentration and photoresist concentration cannot be realized. There is a problem of lack of monitoring and calibration of the measurement accuracy of the developer concentration detection unit 13 and the ultraviolet light absorption detection unit 12. Specifically, once the developer concentration detection unit 13 and the ultraviolet light absorption detection unit 12 are tested inaccurately, it is easy to cause The product has a major substandard problem

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