Vertical probe card for narrow test key

Abstract

The invention provides a vertical probe card for a narrow test card, which comprises a circuit board and a probe group which is arranged on one side of the circuit board and electrically connected with the circuit board; the probe group comprises a plurality of probes which are arranged on the circuit board in a mode of inclined probes; the probes are provided with front probe tips and probe bodies which form obtuse angles; and the middle parts of the front probe tips are provided with annulations. The vertical probes can ensure that the probes move up and down vertically when testing. Compared with the prior probe card, the probe card provided by the invention has simple manufacture craft and low cost.

Description

technical field [0001] The present invention relates to a probe card, in particular to a vertical probe card for narrow test keys. Background technique [0002] During the manufacturing process of the semiconductor process, some test keys for monitoring the electrical parameters related to the components are often placed on the dicing lanes of the chip. However, in order to produce more chips in a limited area of ​​silicon wafers, recently, various semiconductor factories have adopted the method of compressing the width of the scribe line, which poses a great challenge to the use of test keys for electrical measurement. card for testing, figure 1 Shown is a conventional probe card, figure 2 Shown is the shape of the tip of a traditional probe card. The tip of a traditional probe card is pointed, and the diameter of the tip is 13±2um. The tip first touches the test key and then slides forward. The trace of the needle mark is oval, such as image 3 shown. The probe pokes ...

AI Technical Summary

Problems solved by technology

However, the existing vertical probe cards use the elastic deformation of the spring to make the probe move vertically up and down. A spring is installed in the middle of the needle tip, and the elastic deformation of the spring is used to make the needle tip of the probe card poke up and down when it hits the test key. Complete the test action, but the needle marks may not be on the same horizontal line due to the shaking and deformation of the needle in the horizontal direction

Moreover, the existing vertical probe card, the spring-mounted probe and the substrate have high production costs, and the price is 7 to 8 times more expensive than the traditional probe card, which will greatly increase the production cost.

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