Conveyor

Abstract

A conveyor small in construction and less in environmental impact to working site. The conveyors (1, 2) in one aspect of this invention need less space to put them in, because of first and second rotating shafts (11, 12) lying in concentric relation with each other. A mechanism (50) to get out of the dead center is simple in construction and thin in thickness. A coupling at a hand part (20) can be made thin and, correspondingly, an opening of a gate valve to allow the hand part (20) passing through there can be also made small. The conveyor in another aspect is of the type in which two rotating shafts are spaced apart away from one another. With this version, a first arm installed on the rotating shaft can be sometimes different in length from a second arm lying between the first arm and a base supporter. Nevertheless, this conveyor, because the torque transfer of the mechanism (50) to get out of the dead center is released at anywhere else, won't result in working failure even if there is any difference in their length.

Description

technical field [0001] The present invention relates to the technical field of conveying devices. In particular, the first category of the present invention relates to a conveying device with a dead center escape mechanism, and the second category relates to carrying, for example, semiconductor substrates into or out of a vacuum processing chamber, etc. In the case of , it is a conveying device used to convey it to a predetermined position. Background technique [0002] <Background Art of First Category> [0003] A transfer device is used to transfer silicon wafers, glass substrates, etc., but the operating range is often limited by the usage environment. For example, when a transport device is operated in a special environment such as a vacuum in a semiconductor manufacturing device, it must be operated in a limited space inside the device, so the radius of gyration of the transport device must be small. [0004] In addition, in the case of conveying the object to b...

AI Technical Summary

Problems solved by technology

As shown in Japanese Patent Laid-Open No. 9-283588, by making the second pulley 107 ω 1 and ω 2 It is a shape of the same size, and can be operated at any position without conflicting with the control of the posture control device. However, the second arm 121 is excessively restrained, so there is a possibility that vibration is generated during substrate transfer or the straightness of the substrate is impaired. Happening

Images