Method for realizing real-time three-dimensional shape measurement by using unequal step phase shifting cross grating
An orthogonal grating and three-dimensional surface technology, applied in the field of optical three-dimensional sensing, can solve the problem of low precision of three-dimensional reconstruction and achieve high measurement accuracy
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[0015] The present invention will be described in further detail below in conjunction with the accompanying drawings and working principles.
[0016] The optical path of real-time three-dimensional surface shape measurement with non-equal-step phase-shifted orthogonal grating is similar to that of traditional phase measurement profilometry. figure 1 is the projection light path of the PMP method, P 1 and P 2 are the entrance pupil and exit pupil of the projection system, I 2 and I 1 are the entrance and exit pupils of the imaging system. The imaging optical axis is perpendicular to the reference plane, and the included angle with the projection optical axis is θ, they intersect at point O on the reference plane, d is the distance between the optical center of the detector and the optical center of the projection device, l is the detector light The distance from the center to the reference plane.
[0017] A group of non-equal-step phase-shift gratings is designed by comput...
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