Canned linear motor armature and canned linear motor

Abstract

A canned linear motor armature and a canned linear motor of water cooling type are provided. The insulation reliability of a canned linear motor armature is improved. The temperature rises of both the linear motor surface and the armature winding are reduced. Even if the coolant pressure increases, the can neither breaks nor deforms. The weight of the armature is lightened. The viscosity braking force is reduced. In the canned linear motor armature, the armature winding (104) is surrounded with a picture-frame-shaped case (111), both the openings of the case (111) are closed with flat can (121), and coolant passages (131) are provided inside the can (121) and on the top surface of the coil side of the armature winding (104).

Description

technical field [0001] The present invention relates to a sealed linear motor armature and a sealed linear motor, which are used in the stepping drive of semiconductor manufacturing equipment or the workbench feeding of machine tools, and at the same time, it is necessary to reduce the temperature rise of the surface of the linear motor and the armature winding wire, and improve the Insulation reliability, weight reduction and viscous braking force reduction. Background technique [0002] The armature of the conventional sealed linear motor and the shell of the sealed linear motor cover the armature coil, and the refrigerant is recovered from the armature coil by flowing the refrigerant in the refrigerant flow path provided between the armature coil and the shell. heat and reduce the temperature rise on the surface of the linear motor (for example, refer to Patent Documents 1, 2, 3, 4, 5, and 6). [0003] Figure 34 It is an overall perspective view showing the first conven...

AI Technical Summary

Problems solved by technology

[0027] (1) Since water is used as a refrigerant, water seeps into the pores of the molded resin or the gap between the substrates, causing the insulation resistance of the armature winding to decrease or the insulation to be destroyed

[0028] (2) In order to avoid the problem of (1), when the molded resin between the armature winding and the refrigerant flow path is thickened, or a new insulating layer is installed, the thickness of the armature winding must be changed accordingly. As a result, the current for the specified thrust becomes larger, increasing the copper loss and even increasing the temperature rise of the armature winding wire and the shell surface

[0029] (3) In addition, since the insulating layer becomes thicker, the thermal resistance from the armature winding to the refrigerant flow path becomes larger, and the temperature rise of the armature winding becomes larger when power is applied, and the thermal time constant also becomes larger.

However, since a plurality of casing pillars are arranged on the upper surface of the armature winding, the heat generated in the armature winding is conducted to the pillars, increasing the temperature rise of the casing surface.

[0033] (7) Also in (6), since there are many pillars inside the ceramic case, the cross-section of the refrigerant flow path is thin, so the pipe resistance of the refrigerant flow path is extremely large.

As a result, the weight of the armature increases

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