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Active array base plate

An active array and substrate technology, applied in optics, instruments, electrical components, etc., can solve problems such as copper wire erosion, copper residual edge angle, poor quality, etc.

Inactive Publication Date: 2010-03-10
AU OPTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among them, the development of copper wires has received the most attention, but there will be many problems in the process of using copper wires, such as: (1) there is an adhesion problem between copper and glass; (2) when copper is etched, there will be copper Problems such as residue or poor taper; (3) copper wires are susceptible to corrosion by photoresist removal during the photoresist removal process on copper wires; and (4) copper diffusion problems, such as Is it a vertical puncture or a parallel extension?

Method used

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  • Active array base plate
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Examples

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Embodiment Construction

[0065] 1A, 2A, 3A, 4A, 5A, 6A, 7A, 8A, 9A, 10A, and 11A are the top views corresponding to the steps of the manufacturing method of the active array substrate according to an embodiment of the present invention. For the convenience of explanation and understanding, the top views are selectively displayed in perspective.

[0066] Please refer to Figure 1A to Figure 1C . Figure 1B and 1C respectively Figure 1A Sectional views along section lines I-I' and II-II'. It should be noted that the position corresponding to the section line I-I' is where the thin film transistors of the active array substrate are manufactured. Such as Figure 1B and 1C As shown in the figure, first, a substrate 100 is provided, and then a patterned photoresist layer 101 is formed on the substrate 100 .

[0067] Please refer to Figure 2A to Figure 2C . Figure 2B and 2C respectively Figure 2A Sectional views along section lines I-I' and II-II'. Using the patterned photoresist layer 101 as ...

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Abstract

The invention discloses an active array base plate, comprising a base, at least one scanning line, a protective layer, a conductor layer, at least one thin film transistor, and at least one pixel electrode; wherein at least one data wire is vertical to the scanning line; the protective layer is arranged on the data wire, and is provided with an opening to expose the data wire; the conductor layeris arranged on the protective layer and is arranged in the opening for electrically connecting the data wire; the thin film transistor is electrically connected with the scanning line and the data wire; and the pixel electrode is connected with the thin film transistor.

Description

[0001] The patent application of the present invention is a divisional application of the invention patent application filed by the applicant on April 7, 2008 with the application number 200810090659.5 and the invention title "Thin Film Transistor, Active Array Substrate and Manufacturing Method thereof". technical field [0002] The invention relates to an active array substrate and a manufacturing method thereof, in particular to an active array substrate with a structure in which wires are embedded in a substrate. Background technique [0003] The rapid progress of the multimedia society is mostly due to the rapid progress of semiconductor components or display devices. As far as displays are concerned, thin film transistor liquid crystal displays (Thin Film Transistor Liquid Crystal Display, TFT-LCD) with superior characteristics such as high image quality, good space utilization efficiency, low power consumption, and no radiation have gradually become the mainstream of t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/1362G02F1/1368H01L21/82H01L23/522
Inventor 林汉涂杨智钧廖金阅陈建宏
Owner AU OPTRONICS CORP
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