Roller device driving mechanism

Abstract

The invention discloses a roller device driving mechanism which is suitable for driving roller devices which are installed in a vacuum cavity in parallel and used for transmitting substrates. The roller device driving mechanism comprises a driving device, a magnetic transmission device and a sealing cover, wherein the wall of the vacuum cavity is provided with a mounting hole; the sealing cover is installed in the mounting hole in a sealing way; the sealing cover has a bulge in a hollow structure; the magnetic transmission device comprises a transmission gear, an external magnetic loop and aninternal magnetic loop; the transmission gear is sheathed outside the external magnetic loop; the bulge penetrates through the external magnetic loop to be pivoted with the transmission gear; the transmission gear is connected with the driving device; the internal magnetic loop is fixedly sheathed on the roller shaft of the roller device and contained in the hollow structure of the bulge; a permanent magnet is respectively embedded in the external magnetic loop and the internal magnetic loop; the driving device drives the transmission gear to rotate; the transmission gear drives the external magnetic loop to rotate; the external magnetic loop drives the internal magnetic loop to rotate; and the internal magnetic loop drives the roller shaft of the roller device to rotate. The roller device driving mechanism has the advantages of favorable sealing effect, high cleanliness and no noise, and is not easy to damage.

Description

technical field [0001] The invention relates to a driving mechanism for providing power for a conveying device, in particular to a roller device driving mechanism for driving a roller device used for transferring substrates in a vacuum chamber. Background technique [0002] Thin sheets such as glass substrates have been widely used in the manufacture of LCD-TFT displays, organic light-emitting display device (OLED) panels, thin-film solar panel applications, and the like. In such applications, thin-film transistors are mostly coated on clean glass. The process of such large glass substrates usually involves the implementation of multiple sequential steps, including chemical vapor deposition (CVD), physical vapor deposition (PVD), organic Substance evaporation, magnetron sputtering deposition or etching processes. A system for processing glass substrates may include one or more process chambers for performing the aforementioned processes. The current trend in panel processi...

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Problems solved by technology

[0004] The obtaining of the vacuum environment depends on the ability to seal. According to the working requirements of different vacuum chambers, in the vacuum transmission system, the power source is generally transmitted from the outside to the inside. The first thing to solve is the sealing between the transmission system and the vacuum chamber. At the same time, based on Manufacturing requirements must ensure that all transmission actuators can move synchronously. In the prior art, most of the power transmission of the vacuum chamber adopts dynamic sealing transmission. On the one hand, dynamic sealing is not easy to achieve in the past dynamic sealing transmission. The requirements are high. On the other hand, the dynamic seal is unstable, and repeated actions are likely to cause damage to the sealing components and affect the sealing requirements.

The transmission in the vacuum chamber adopts a large number of rollers, ball ejector pins, etc. On the one hand, the contact between the rollers and the conveyed device will cause unavoidable wear, and on the other hand, the use of a large number of rollers and ball ejector pins will also bring a lot of damage to the vacuum environment. Pollution

The synchronous connection inside the cavity, due to the relative movement and direct physical contact between the sprocket and the chain or / and the synchronous pulley and the synchronous belt, will increase the source of contamination from the drive

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