Triangle diamond cutter angle high-precision automatic measuring system and measuring method
A diamond tool, automatic measurement technology, applied in the direction of measuring devices, instruments, and optical devices, etc., can solve the problems of the measured angle error, error, and the position relationship of the measuring tool without paying attention to the observation direction.
Active Publication Date: 2010-06-02
TIANJIN UNIV
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Problems solved by technology
The very important parameter for triangular diamond tools is the tool angle. At present, the methods for measuring the angle mainly include non-contact optical methods such as universal tool microscope, super depth-of-field microscope, and measurement projector. , there is an error in the measured angle, which leads to the problem that the measured value is different each time
In addition, the existing methods mainly rely on manually selecting the outer contour of the tool for measurement, which will inevitably introduce human error
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[0019] The system structure of the present invention is as figure 1 As shown, the backlight board, magnifying lens and camera are fixed on the same bracket to form the overall structure of the collection device and placed on the lifting platform, the optical axis of the collection device is perpendicular to the axis of the lifting platform. The focal length and magnification of the magnifying lens are fixed, so its focusing distance and depth of field range are also determined. A translation platform that can be moved in a small amount is placed on the base of the system, which can perform bidirectional movement from the backlight panel to the lens. The movement axis is parallel to the acquisition device and perpendicular to the axis of the lifting platform. Stack the angle stage and the rotation stage on the translation platform in sequence. The rotation axis of the angle stage is perpendicular to the axis of the lifting platform and the optical axis of the acquisition device...
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The invention belongs to the optical measurement and processing technical field, relating to an ultraprecise home position measuring device based on a flexible measuring head. The device comprises the flexible measuring head, an image transmitting fiber, a coupling mirror, a high-precision rotary table and an optical three-dimensional measuring system; wherein the flexible measuring head is arranged on the high-precision rotary table, and the center thereof is arranged on the axis of the rotation axis of the rotary table, and the image of the measured side acquired by the flexible measuring head is transmitted to the optical three-dimensional measuring system through the image transmitting fiber and the coupling mirror sequentially. The invention also provides an ultraprecise processing method implemented by utilizing the measuring device. The measuring device of the invention can lengthen and shorten the optical measuring system and can realize high curvature surface shape measurement and ultraprecise processing compensation.
Description
technical field [0001] The invention belongs to the technical fields of ultra-precision machining, computer vision detection and image testing, and relates to a high-precision automatic measurement system for the angle of a triangular diamond tool. Background technique [0002] Diamond tools are the main tool for ultra-precision cutting. They have good wear resistance, hardness and thermal conductivity, and can be used for single cutting of non-ferrous metals to achieve nano-level roughness surface processing. The triangular diamond tool is an important tool for processing microstructures such as microgrooves and microprisms. Since the microstructure is directly copied on the workpiece by the shape of the tool, the accuracy of the tool parameters is an important indicator to ensure the processing of the microstructure. The very important parameter for the triangular diamond tool is the tool angle. At present, the methods for measuring the angle mainly include non-contact opt...
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IPC IPC(8): G01B11/26
Inventor 张效东房丰洲杨朝鹏卢永斌
Owner TIANJIN UNIV