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Automated test and characterization data analysis methods and arrangement

A technology of data analysis module and test group, which is used in electronic circuit testing, electrical digital data processing, complex mathematical operations, etc.

Active Publication Date: 2010-06-09
LAM RES CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Even then, the lack of effective tools to analyze this data makes troubleshooting a daunting task and makes tracking down the source of problems a challenge

Method used

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  • Automated test and characterization data analysis methods and arrangement
  • Automated test and characterization data analysis methods and arrangement
  • Automated test and characterization data analysis methods and arrangement

Examples

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Embodiment Construction

[0028] The present invention will now be described in detail in terms of several embodiments thereof as illustrated in the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, it will be apparent to those skilled in the art that the present invention may be practiced without some or all of these specific details. In some instances, well-known process steps and / or structures have not been described in order to avoid unnecessarily obscuring the present invention.

[0029] Several specific embodiments, including methods and techniques, are described below. It should be remembered that the present invention also covers articles of manufacture containing computer-readable media storing computer-readable instructions for carrying out the techniques of the present invention. Computer-readable media may include, for example, semiconductor, magnetic, opto-magnetic, ...

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Abstract

A method for testing a component configured to be installed in a plasma processing system. The method includes providing an ATAC (Automated Test and Characterization) fixture, which includes a system control software package ( SCS) that is representative of production system control software, a data manager module configured to obtain specification data from a database over a computer network, a test manager module configured to execute a set of tests designed to test the component, a SCS interface engine configured to provide the set of tests to the SCS, and a data analysis module configuredto provide computer-implemented data analysis tool for analyzing test data obtained from the testing the component. The method also includes coupling the ATAC fixture to the component to enable the SCS in the ATAC fixture to test the component utilizing the set of tests and at least a portion of the specification data.

Description

Background technique [0001] Advances in plasma processes have brought about the development of the semiconductor industry. A series of quality control tests are performed before a plasma process system, such as a plasma combination tool, is deployed to a customer site. Data from these quality control tests needs to be collected and stored for subsequent analysis. [0002] Typically, a plasma combination tool and its various components undergo extensive quality control testing before the plasma combination tool is shipped from the manufacturer to the customer. The plasma combination tool discussed here may contain multiple modules (eg, processing modules, transmission modules, etc.) and may contain multiple subsystems (eg, RF (radio frequency) matchers, gas boxes, TCP matchers, bias matchers, etc. ) plasma process system. For ease of discussion, we use the term "assembly" to refer to a single or multi-part device in a plasma combination tool. Thus, a component can be as sim...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R31/28G06F11/00
CPCG05B19/042H01J37/3299G05B2219/2602H04L12/66H01J37/32522G06F11/00G06F17/18G06F15/16
Inventor 顾蒂娜派柳保罗·罗纳德·巴林泰恩许杰安杰米·萨米恩托
Owner LAM RES CORP
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