Phase searching detection method for permanent-magnet planar motor by adopting linear Hall array

Abstract

A phase searching detection method for a permanent-magnet planar motor by adopting a linear Hall array is characterized in that each coil corresponds to a Hall array and the Hall array is placed perpendicular to the horizontal output direction of each driving unit of the coil; linear Hall sensors in the Hall array are distributed in equal space in the even-multiple polar distance, are placed parallel with a permanent magnet array and are used for measuring the magnetic flux density component perpendicular to the movement direction of the planar motor; and the output signal of the Hall array is generated by adding all the signals of the linear Hall sensors in the Hall array. The output signal is basically changeless when the Hall array moves perpendicular to the horizontal thrust direction of the corresponding coil, and the signal carries out positive-negative alternation in the horizontal thrust direction of the corresponding coil and changes close to the sinusoidal waveform. The position relations between the coils and the permanent magnet array when the current in the coils of the driving units is zero (phase-change point) are determined. The phase searching detection of the permanent-magnet planar motor in two dimensions becomes superposition of two one-dimensional phase searching detection, thus realizing planar phase searching detection.

Description

technical field [0001] The invention relates to a phase-finding method for a permanent-magnet planar motor, in particular to a measurement method for determining a coil current commutation point of a permanent-magnet planar motor by using a linear Hall array. Background technique [0002] With the rapid development of advanced manufacturing industry, high-precision positioning platform technology has been in-depth research and development, and has broad application prospects in the semiconductor industry, micro-stereolithography, nano-workbench, high-precision plotter and other fields, among which the most important Its application is a high-precision lithography positioning platform in the semiconductor industry. Modern precision and ultra-precision machining equipment has a wave-cutting demand for high-response, high-speed, and high-precision planar drive devices. The original planar driving device was realized by two direct-driven linear motors, using a stacked driving s...

AI Technical Summary

Problems solved by technology

The relative position measurement of the drive unit and the permanent magnet array generally uses an incremental position sensor such as a grating ruler, so that the commutation point of the drive unit coil (the position of the coil and the permanent magnet array corresponding to the current zero crossing point in the coil) cannot be determined, that is, Unable to determine the phase relationship of the coil and the initial position of the permanent magnet array

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