Method and device for generating monopole radio-frequency capacitance coupling low-temperature plasma under atmospheric pressure

Abstract

The invention relates to a method and a device for generating a monopole radio-frequency capacitance coupling low-temperature plasma under atmospheric pressure, the mixed gas of inert gas and air is used as a discharge working gas, the generated plasma easily acts on a processed object through an open type structure of a discharge region, and the invention can solve the problem of applied range limitation caused by structural fixation of a traditional plasma generating device, overhigh macroscopic temperature of the plasma and overhigh particle energy density in the plasma and can solve the problem of application in complex environments. The invention has the following characteristics that the plasma with low macroscopic temperature and moderate particle energy density is generated under the conditions of atmospheric pressure, low voltage and room temperature, the invention is applicable in the fields of medical sanitation, food sanitation and the like, and meanwhile, an open type plasma generating mode with low cost and less energy consumption can be used in the medical application fields of medical sterilization and disinfection in the complex environments such as dental decayed teeth and the like, medical sterilization and disinfection of cosmetic minimally invasive operations, cellular level operations and the like and the fields of food fresh keeping and the like.

Description

technical field [0001] The invention belongs to the technical field of gas discharge and plasma application, and in particular relates to a method and device for generating low-temperature plasma with unipolar radio-frequency capacitive coupling under atmospheric pressure. Background technique [0002] In the field of medicine and food, sterilization methods and devices are widely used. The traditional vacuum or low-pressure bipolar capacitively coupled low-temperature plasma generation method and device, because of the need to use expensive vacuum or low-voltage equipment, the fixed structure of the generating device cannot The treatment of irregular surfaces, the generated plasma macroscopic temperature is too high, and the applied voltage is too high, which can no longer meet the needs of modern medicine and food fields. The method and device for generating low-temperature plasma with unipolar radio frequency capacitive coupling under atmospheric pressure overcome the trad...

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Problems solved by technology

[0002] In the field of medicine and food, sterilization methods and devices are widely used. The traditional vacuum or low-pressure bipolar capacitively coupled low-temperature plasma generation method and device, because of the need to use expensive vacuum or low-voltage equipment, the fixed structure of the generating device cannot The treatment of irregular surfaces, the generated plasma macroscopic temperature is too high, and the applied voltage is too high, which can no longer meet the needs of modern medicine and food fields. The method and device for generating low-temperature plasma with unipolar radio frequency capacitive coupling under atmospheric pressure overcome the traditional The above-mentioned many shortcomings of the bipolar capacitively coupled low-temperature plasma generation method and device under vacuum or low pressure

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