Phase modulation stepped array micro-spectrograph

Abstract

The invention relates to a phase modulation stepped array micro-spectrograph which comprises a micro-interferometer two-dimensional array constructed on the upper surface of a substrate (3). Each micro interferometer is provided with a first step (1); the first steps (1) have different heights in different micro-interferometers; the lower surface of the substrate (3) is provided with a CCD (4), and a layer of shielding objects (7) is arranged between the substrate (3) and the CCD (4); most of CCD surface elements are shielded by the shielding objects (7), light holes are left in the shielding objects (7) below each micro interferometer, the diameter of each light hole is smaller than the minimum wavelength of an incident light wave detected by the CCD (4), the width of the first step and the wavelength of the incident light wave are in the same magnitude, the maximum height of the first step also is the wavelength magnitude of the incident light wave, two confocal lenses (6) are arranged above the micro-interferometer two-dimensional array, an a light shielding plate at the focal point between the two confocal lenses (6) is provided with small holes (5). The invention solves the technical problems of large volume, vibration sensitivity, high manufacturing cost, low resolution, narrow measured bandwidth and the like.

Description

technical field [0001] The invention relates to a spectrum measurement device, in particular to a portable real-time detection spectrum measurement device. Background technique [0002] A spectrometer is an important analytical instrument that analyzes the composition and content of a substance by obtaining the spectral signal of the research substance. The application of the spectrometer has been expanded with every development of the spectrometer, and it has been widely used in almost all analytical fields. Such as modern scientific experiments, biological research, medical and medical research, industrial and agricultural production, national defense, astronomical observation, etc. Specifically, in geological exploration, the inspection of various material components and their contents in ores; in the metallurgical industry, the analysis of C, P, and S in molten steel; in the food industry. Analysis of harmful metal impurities and vitamins in food; in biology, medicine, ...

AI Technical Summary

Problems solved by technology

[0004] Technical problem: The purpose of the present invention is to provide a phase-modulated stepped array micro-spectrometer, which solves the technical problems in the background technology such as large volume, sensitivity to vibration, high production cost, low resolution, and narrow measurement frequency bandwidth.

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