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Technology for shaping antireflection coating on inner wall of cover glass tube

A technology of anti-reflection coating and cover glass tube, which is applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., and can solve the problem that the selection of quantity is not specific enough

Inactive Publication Date: 2010-10-20
SHANDONG LINUO NEW MATERIAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This method only pioneers the introduction of ion-enhanced chemical vapor deposition, without in-depth analysis of the method. The selection of process parameters only has a qualitative selection, and the selection of quantity is not specific enough. It still needs to pay a lot of creative labor to obtain suitable technical effects

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  • Technology for shaping antireflection coating on inner wall of cover glass tube
  • Technology for shaping antireflection coating on inner wall of cover glass tube

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Embodiment Construction

[0029] A forming process for an anti-reflection coating on the inner wall of a cover glass tube, comprising the following steps:

[0030] 1) Cleaning: Clean the inner wall of the cover glass tube without oil on the surface, and then rinse the inner wall of the cover glass tube with deionized water;

[0031] 2) Drying: Fully dry the cover glass tube;

[0032] 3) Vacuuming: Connect the cover glass tube to the vacuum system, and put a non-polar annular high-frequency discharge coil on the cover glass tube. The coil is controlled by the control device to move at a constant speed along the axis of the cover glass tube; The tube is evacuated to a predetermined vacuum degree;

[0033] 4) Filling with reaction gas: fill the inner cavity 3 of the cover glass tube with hexamethyldisiloxane and oxygen, the stable flow rate of the former is 18-22 sccm, and the latter is 0.28-0.32 slm.

[0034] 5) When starting to fill the reaction gas until the flow rate of the reaction gas reaches the ...

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Abstract

The invention discloses technology for shaping an antireflection coating on the inner wall of the cover glass tube. The technology comprises the following steps of: cleaning, drying, vacuumizing, filling reaction gases; when reaction gas flow reaches the lower limit flow, opening an electrodeless high-frequency discharge coil to ionize the reaction gases, wherein the current is between 2.3 and 2.7 A, the voltage is between 3.4 and 3.8 kV, simultaneously controlling the coil to move along the axial direction of the cover glass tube at a constant speed, detecting the transmittance of the cover glass tube through a transmittance measuring device, and if the increase of the transmittance reaches the set value, finishing the anti-reflection of the current cover glass tube; and taking the current cover glass tube out, and performing anti-reflection on the next cover glass tube. According to the shaping technology of the technical scheme of the invention, the mechanical strength of the cover glass tube is improved on the premise of meeting the requirement of high transmissivity of the obtained coating.

Description

technical field [0001] The invention relates to a forming process of an anti-reflection coating on the inner wall of a cover glass tube, and belongs to the technical field of solar heat collection tube coating treatment. Background technique [0002] As we all know, the heat collection efficiency of the vacuum solar collector tube depends not only on the solar absorption ratio of the inner tube, but also on the solar transmittance of the cover glass circular tube. At present, the glass commonly used in all-glass vacuum solar collector tubes is high borosilicate 3.3 glass, and its solar transmittance is about 89%. It can be seen that there is great potential to obtain greater light-to-heat conversion efficiency by increasing the solar transmittance of the cover glass tube. . With the introduction of medium and high temperature applications, the promotion of medium and high temperature heat collector tubes that are directly applied to solar air conditioning, seawater desalina...

Claims

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Application Information

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IPC IPC(8): C23C16/455C23C16/50C23C16/42C23C16/40
Inventor 李业博刘希杰张化明杜勇裴圣盟
Owner SHANDONG LINUO NEW MATERIAL