Technology for shaping antireflection coating on inner wall of cover glass tube
A technology of anti-reflection coating and cover glass tube, which is applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., and can solve the problem that the selection of quantity is not specific enough
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[0029] A forming process for an anti-reflection coating on the inner wall of a cover glass tube, comprising the following steps:
[0030] 1) Cleaning: Clean the inner wall of the cover glass tube without oil on the surface, and then rinse the inner wall of the cover glass tube with deionized water;
[0031] 2) Drying: Fully dry the cover glass tube;
[0032] 3) Vacuuming: Connect the cover glass tube to the vacuum system, and put a non-polar annular high-frequency discharge coil on the cover glass tube. The coil is controlled by the control device to move at a constant speed along the axis of the cover glass tube; The tube is evacuated to a predetermined vacuum degree;
[0033] 4) Filling with reaction gas: fill the inner cavity 3 of the cover glass tube with hexamethyldisiloxane and oxygen, the stable flow rate of the former is 18-22 sccm, and the latter is 0.28-0.32 slm.
[0034] 5) When starting to fill the reaction gas until the flow rate of the reaction gas reaches the ...
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