Small-sized magnetic deflection mass spectrometer
A magnetic deflection mass spectrometer, a small technology, is used in material analysis, measuring devices, instruments and other directions by electromagnetic means, which can solve the problems of difficult and accurate determination, small changes in instrument sensitivity and resolution, and heavy weight, and achieves easy production. , reduce quality discrimination, reduce the effect of quality and power consumption
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[0011] Preferred embodiments of the present invention will be described below in conjunction with the accompanying drawings.
[0012] figure 1 It is a small magnetic deflection mass spectrometer realized according to the present invention. It consists of an ion source 1, an ion source vacuum chamber 2, a magnetic analyzer 3, a flight pipeline 4, a receiver 5, and a receiver vacuum chamber 6. The ion source 1 is placed in the ion In the source vacuum chamber 2, the inlet end of the flight pipeline 4 is connected to the ion source vacuum chamber 2, and the flight pipeline 4 is provided with two outlets, which are respectively connected to two receiver vacuum chambers 5, and the magnetic analyzer 3 is set outside the flight pipeline 4. The receiver 5 is arranged in a receiver vacuum chamber 6 .
[0013] The ion source of the mass spectrometer adopts a small Neil-type ion source, which is mainly composed of an ionization box, a filament and an ion optical system.
[0014] The ma...
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